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Power consumption of semiconductor fabs in Taiwan

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  • Hu, S.-C.
  • Chuah, Y.K.

Abstract

This paper reports and analyzes power consumption for nine representative semiconductor fabs in Taiwan. The power consumption data were obtained by surveys and site visits. Analysis results indicate that the average power consumption for the fabs is 2.18 kW/m2 and the average cooling load is 0.434 RT/m2. The average power consumption per unit product (wafer) area is 1.432 kWh/cm2, which is consistent with the data (3.1 kWh/cm2 in 1983 to 1.41 kWh/cm2 in 1995) reported by the US Department of Commerce and Dataquest. The facility system consumes the most of the power consumption (about 56.6%) of the semiconductor fabs. Process tools are the next largest power consuming item, accounting for 40.4% of the power consumed in the fabs. A facility system includes the chiller plant, makeup air, recirculation air, exhaust air, gases, compressed dry air, process cooling water, vacuum and ultra-pure water systems. The power consumption of the different facility components is analyzed and compared.

Suggested Citation

  • Hu, S.-C. & Chuah, Y.K., 2003. "Power consumption of semiconductor fabs in Taiwan," Energy, Elsevier, vol. 28(8), pages 895-907.
    • Handle: RePEc:eee:energy:v:28:y:2003:i:8:p:895-907
    DOI: 10.1016/S0360-5442(03)00008-2
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    Citations

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    Cited by:

    1. Lee, Chien-Chiang & Chang, Chun-Ping, 2007. "The impact of energy consumption on economic growth: Evidence from linear and nonlinear models in Taiwan," Energy, Elsevier, vol. 32(12), pages 2282-2294.
    2. Gao, Wei & Feng, Xiao, 2017. "The power target of a fluid machinery network in a circulating water system," Applied Energy, Elsevier, vol. 205(C), pages 847-854.
    3. Chang, Yung-Chung & Chan, Tien-Shun & Lee, Wen-Shing, 2010. "Economic dispatch of chiller plant by gradient method for saving energy," Applied Energy, Elsevier, vol. 87(4), pages 1096-1101, April.
    4. Hu, Shih-Cheng & Xu, Tengfang & Chaung, Tony & Chan, David Y.-L., 2010. "Characterization of energy use in 300 mm DRAM (Dynamic Random Access Memory) wafer fabrication plants (fabs) in Taiwan," Energy, Elsevier, vol. 35(9), pages 3788-3792.
    5. Xu, Tengfang & Flapper, Joris, 2009. "Energy use and implications for efficiency strategies in global fluid-milk processing industry," Energy Policy, Elsevier, vol. 37(12), pages 5334-5341, December.
    6. Chang, Yung-Chung, 2006. "An innovative approach for demand side management—optimal chiller loading by simulated annealing," Energy, Elsevier, vol. 31(12), pages 1883-1896.
    7. Zhao, Wenxuan & Li, Hangxin & Wang, Shengwei, 2022. "A comparative analysis on alternative air-conditioning systems for high-tech cleanrooms and their performance in different climate zones," Energy, Elsevier, vol. 261(PA).
    8. Min-Suk Jo & Jang-Hoon Shin & Won-Jun Kim & Jae-Weon Jeong, 2017. "Energy-Saving Benefits of Adiabatic Humidification in the Air Conditioning Systems of Semiconductor Cleanrooms," Energies, MDPI, vol. 10(11), pages 1-23, November.
    9. Cheng-Kuang Chang & Tee Lin & Shih-Cheng Hu & Ben-Ran Fu & Jung-Sheng Hsu, 2016. "Various Energy-Saving Approaches to a TFT-LCD Panel Fab," Sustainability, MDPI, vol. 8(9), pages 1-10, September.
    10. Chang, Cheng-Kuang & Hu, Shih-Cheng & Liu, Vincent & Chan, David Yi-Liang & Huang, Chin-Yi & Weng, Ling-Chia, 2012. "Specific energy consumption of dynamic random access memory module supply chain in Taiwan," Energy, Elsevier, vol. 41(1), pages 508-513.
    11. Xu, Tengfang & Flapper, Joris & Kramer, Klaas Jan, 2009. "Characterization of energy use and performance of global cheese processing," Energy, Elsevier, vol. 34(11), pages 1993-2000.
    12. Foo, Dominic C.Y. & Ng, Denny K.S. & Leong, Malwynn K.Y. & Chew, Irene M.L. & Subramaniam, Mahendran & Aziz, Ramlan & Lee, Jui-Yuan, 2014. "Targeting and design of chilled water network," Applied Energy, Elsevier, vol. 134(C), pages 589-599.
    13. Armin Ibitz, 2020. "Assessing Taiwan’s endeavors towards a circular economy: the electronics sector," Asia Europe Journal, Springer, vol. 18(4), pages 493-510, December.
    14. Mieczysław Porowski & Monika Jakubiak, 2022. "Energy-Optimal Structures of HVAC System for Cleanrooms as a Function of Key Constant Parameters and External Climate," Energies, MDPI, vol. 15(1), pages 1-41, January.
    15. Chang, Yung-Chung & Chen, Wu-Hsing, 2009. "Optimal chilled water temperature calculation of multiple chiller systems using Hopfield neural network for saving energy," Energy, Elsevier, vol. 34(4), pages 448-456.

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