IDEAS home Printed from https://ideas.repec.org/a/gam/jeners/v10y2017i11p1774-d117475.html
   My bibliography  Save this article

Energy-Saving Benefits of Adiabatic Humidification in the Air Conditioning Systems of Semiconductor Cleanrooms

Author

Listed:
  • Min-Suk Jo

    (Department of Architectural Engineering, College of Engineering, Hanyang University, 222 Wangsimni-Ro, Seongdong-Gu, Seoul 04763, Korea)

  • Jang-Hoon Shin

    (Department of Architectural Engineering, College of Engineering, Hanyang University, 222 Wangsimni-Ro, Seongdong-Gu, Seoul 04763, Korea)

  • Won-Jun Kim

    (Department of Architectural Engineering, College of Engineering, Hanyang University, 222 Wangsimni-Ro, Seongdong-Gu, Seoul 04763, Korea)

  • Jae-Weon Jeong

    (Department of Architectural Engineering, College of Engineering, Hanyang University, 222 Wangsimni-Ro, Seongdong-Gu, Seoul 04763, Korea)

Abstract

This paper aimed to evaluate the applicability of adiabatic humidification in the heating, ventilation, and air conditioning (HVAC) systems of semiconductor cleanrooms. Accurate temperature and humidity control are essential in semiconductor cleanrooms and high energy consumption steam humidification is commonly used. Therefore, we propose an adiabatic humidification system employing a pressurized water atomizer to reduce the energy consumption. The annual energy consumption of three different HVAC systems were analyzed to evaluate the applicability of adiabatic humidification. The studied cases were as follows: (1) CASE 1: a make-up air unit (MAU) with a steam humidifier, a dry cooling coil (DCC), and a fan filter unit (FFU); (2) CASE 2: a MAU with the pressurized water atomizer, a DCC, and a FFU; and (3) CASE 3: a MAU, a DCC, and a FFU, and the pressurized water atomizer installed in the return duct. The energy saving potential of adiabatic humidification over steam humidification has been proved, with savings of 8% and 23% in CASE 2 and CASE 3 compared to CASE 1, respectively. Furthermore, the pressurized water atomizer installed in the return duct exhibits greater energy saving effect than when installed in the MAU.

Suggested Citation

  • Min-Suk Jo & Jang-Hoon Shin & Won-Jun Kim & Jae-Weon Jeong, 2017. "Energy-Saving Benefits of Adiabatic Humidification in the Air Conditioning Systems of Semiconductor Cleanrooms," Energies, MDPI, vol. 10(11), pages 1-23, November.
    • Handle: RePEc:gam:jeners:v:10:y:2017:i:11:p:1774-:d:117475
    as

    Download full text from publisher

    File URL: https://www.mdpi.com/1996-1073/10/11/1774/pdf
    Download Restriction: no
    File URL: https://www.mdpi.com/1996-1073/10/11/1774/
    Download Restriction: no
    ---><---

    References listed on IDEAS

    as
    1. Hu, S.-C. & Chuah, Y.K., 2003. "Power consumption of semiconductor fabs in Taiwan," Energy, Elsevier, vol. 28(8), pages 895-907.
    2. Duk Joon Park & Ki Hyung Yu & Yong Sang Yoon & Kee Han Kim & Sun Sook Kim, 2015. "Analysis of a Building Energy Efficiency Certification System in Korea," Sustainability, MDPI, vol. 7(12), pages 1-22, December.
    Full references (including those not matched with items on IDEAS)

    Citations

    Citations are extracted by the CitEc Project, subscribe to its RSS feed for this item.
    as


    Cited by:

    1. Wang, Kung-Jeng & Lin, Chiuhsiang Joe & Dagne, Teshome Bekele & Woldegiorgis, Bereket Haile, 2022. "Bilayer stochastic optimization model for smart energy conservation systems," Energy, Elsevier, vol. 247(C).
    2. Zhuang, Chaoqun & Wang, Shengwei & Shan, Kui, 2019. "Probabilistic optimal design of cleanroom air-conditioning systems facilitating optimal ventilation control under uncertainties," Applied Energy, Elsevier, vol. 253(C), pages 1-1.
    3. Soo-Jin Lee & Hansol Lim & Jae-Weon Jeong, 2021. "Energy Benefit of Liquid Desiccant-Assisted Humidification in Buildings during Winter Operation," Energies, MDPI, vol. 14(5), pages 1-24, March.
    4. Hsin-Chieh Wu & Horng-Ren Tsai & Tin-Chih Toly Chen & Keng-Wei Hsu, 2021. "Energy-Efficient Production Planning Using a Two-Stage Fuzzy Approach," Mathematics, MDPI, vol. 9(10), pages 1-17, May.

    Most related items

    These are the items that most often cite the same works as this one and are cited by the same works as this one.
    1. Mustaffa, Nur Kamaliah & Kudus, Sakhiah Abdul, 2022. "Challenges and way forward towards best practices of energy efficient building in Malaysia," Energy, Elsevier, vol. 259(C).
    2. Hye Gi Kim & Sun Sook Kim, 2020. "Occupants’ Awareness of and Satisfaction with Green Building Technologies in a Certified Office Building," Sustainability, MDPI, vol. 12(5), pages 1-16, March.
    3. Kim, Min-Hwi & Kim, Deukwon & Heo, Jaehyeok & Lee, Dong-Won, 2020. "Energy performance investigation of net plus energy town: Energy balance of the Jincheon Eco-Friendly energy town," Renewable Energy, Elsevier, vol. 147(P1), pages 1784-1800.
    4. Lee, Junghun & Yoo, Seunghwan & Kim, Jonghun & Song, Doosam & Jeong, Hakgeun, 2018. "Improvements to the customer baseline load (CBL) using standard energy consumption considering energy efficiency and demand response," Energy, Elsevier, vol. 144(C), pages 1052-1063.
    5. Lee, Junsoo & Kim, Tae Wan & Koo, Choongwan, 2022. "A novel process model for developing a scalable room-level energy benchmark using real-time bigdata: Focused on identifying representative energy usage patterns," Renewable and Sustainable Energy Reviews, Elsevier, vol. 169(C).
    6. Yeweon Kim & Ki-Hyung Yu, 2018. "Study on Policy Marking of Passive Level Insulation Standards for Non-Residential Buildings in South Korea," Sustainability, MDPI, vol. 10(7), pages 1-16, July.
    7. Hye Gi Kim & Hyun Jun Kim & Chae Hwan Jeon & Myeong Won Chae & Young Hum Cho & Sun Sook Kim, 2020. "Analysis of Energy Saving Effect and Cost Efficiency of ECMs to Upgrade the Building Energy Code," Energies, MDPI, vol. 13(18), pages 1-22, September.
    8. Zhao, Wenxuan & Li, Hangxin & Wang, Shengwei, 2022. "A comparative analysis on alternative air-conditioning systems for high-tech cleanrooms and their performance in different climate zones," Energy, Elsevier, vol. 261(PA).
    9. Eunyoung Kim & Eunkyoung Hwang, 2017. "Analysis of the Current Scoring Distribution by Evaluation Criteria in Korean Long-Life Housing Certification System Cases," Sustainability, MDPI, vol. 9(10), pages 1-20, October.
    10. Afonso Miguel Solak & Antonio José Tenza-Abril & José Miguel Saval & Victoria Eugenia García-Vera, 2018. "Effects of Multiple Supplementary Cementitious Materials on Workability and Segregation Resistance of Lightweight Aggregate Concrete," Sustainability, MDPI, vol. 10(11), pages 1-14, November.
    11. Xu, Tengfang & Flapper, Joris & Kramer, Klaas Jan, 2009. "Characterization of energy use and performance of global cheese processing," Energy, Elsevier, vol. 34(11), pages 1993-2000.
    12. Foo, Dominic C.Y. & Ng, Denny K.S. & Leong, Malwynn K.Y. & Chew, Irene M.L. & Subramaniam, Mahendran & Aziz, Ramlan & Lee, Jui-Yuan, 2014. "Targeting and design of chilled water network," Applied Energy, Elsevier, vol. 134(C), pages 589-599.
    13. Armin Ibitz, 2020. "Assessing Taiwan’s endeavors towards a circular economy: the electronics sector," Asia Europe Journal, Springer, vol. 18(4), pages 493-510, December.
    14. Ki Uhn Ahn & Han Sol Shin & Cheol Soo Park, 2019. "Energy Analysis of 4625 Office Buildings in South Korea," Energies, MDPI, vol. 12(6), pages 1-16, March.
    15. Lee, Chien-Chiang & Chang, Chun-Ping, 2007. "The impact of energy consumption on economic growth: Evidence from linear and nonlinear models in Taiwan," Energy, Elsevier, vol. 32(12), pages 2282-2294.
    16. Chang, Yung-Chung, 2006. "An innovative approach for demand side management—optimal chiller loading by simulated annealing," Energy, Elsevier, vol. 31(12), pages 1883-1896.
    17. Cheng-Kuang Chang & Tee Lin & Shih-Cheng Hu & Ben-Ran Fu & Jung-Sheng Hsu, 2016. "Various Energy-Saving Approaches to a TFT-LCD Panel Fab," Sustainability, MDPI, vol. 8(9), pages 1-10, September.
    18. Chang, Yung-Chung & Chan, Tien-Shun & Lee, Wen-Shing, 2010. "Economic dispatch of chiller plant by gradient method for saving energy," Applied Energy, Elsevier, vol. 87(4), pages 1096-1101, April.
    19. Hu, Shih-Cheng & Xu, Tengfang & Chaung, Tony & Chan, David Y.-L., 2010. "Characterization of energy use in 300 mm DRAM (Dynamic Random Access Memory) wafer fabrication plants (fabs) in Taiwan," Energy, Elsevier, vol. 35(9), pages 3788-3792.
    20. Xu, Tengfang & Flapper, Joris, 2009. "Energy use and implications for efficiency strategies in global fluid-milk processing industry," Energy Policy, Elsevier, vol. 37(12), pages 5334-5341, December.

    Corrections

    All material on this site has been provided by the respective publishers and authors. You can help correct errors and omissions. When requesting a correction, please mention this item's handle: RePEc:gam:jeners:v:10:y:2017:i:11:p:1774-:d:117475. See general information about how to correct material in RePEc.

    If you have authored this item and are not yet registered with RePEc, we encourage you to do it here. This allows to link your profile to this item. It also allows you to accept potential citations to this item that we are uncertain about.

    If CitEc recognized a bibliographic reference but did not link an item in RePEc to it, you can help with this form .

    If you know of missing items citing this one, you can help us creating those links by adding the relevant references in the same way as above, for each refering item. If you are a registered author of this item, you may also want to check the "citations" tab in your RePEc Author Service profile, as there may be some citations waiting for confirmation.

    For technical questions regarding this item, or to correct its authors, title, abstract, bibliographic or download information, contact: MDPI Indexing Manager (email available below). General contact details of provider: https://www.mdpi.com .

    Please note that corrections may take a couple of weeks to filter through the various RePEc services.

    IDEAS is a RePEc service. RePEc uses bibliographic data supplied by the respective publishers.