Analysing semiconductor manufacturing big data for root cause detection of excursion for yield enhancement
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DOI: 10.1080/00207543.2015.1109153
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References listed on IDEAS
- Jianjun Shi & Shiyu Zhou, 2009. "Quality control and improvement for multistage systems: A survey," IISE Transactions, Taylor & Francis Journals, vol. 41(9), pages 744-753.
- Hsu, Shao-Chung & Chien, Chen-Fu, 2007. "Hybrid data mining approach for pattern extraction from wafer bin map to improve yield in semiconductor manufacturing," International Journal of Production Economics, Elsevier, vol. 107(1), pages 88-103, May.
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- Chen-Fu Chien & Stephane Dauzere-Peres & Hans Ehm & John W. Fowler & Zhibin Jiang & Shekar Krishnaswamy & Tae-Eog Lee & Lars Monch & Reha Uzsoy, 2011. "Modelling and analysis of semiconductor manufacturing in a shrinking world: challenges and successes," European Journal of Industrial Engineering, Inderscience Enterprises Ltd, vol. 5(3), pages 254-271.
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Cited by:
- Wenhan Fu & Chen-Fu Chien & Lizhen Tang, 2022. "Bayesian network for integrated circuit testing probe card fault diagnosis and troubleshooting to empower Industry 3.5 smart production and an empirical study," Journal of Intelligent Manufacturing, Springer, vol. 33(3), pages 785-798, March.
- Eduardo Oliveira & Vera L. Miguéis & José L. Borges, 2023. "Automatic root cause analysis in manufacturing: an overview & conceptualization," Journal of Intelligent Manufacturing, Springer, vol. 34(5), pages 2061-2078, June.
- Seokho Kang, 2020. "Joint modeling of classification and regression for improving faulty wafer detection in semiconductor manufacturing," Journal of Intelligent Manufacturing, Springer, vol. 31(2), pages 319-326, February.
- Chen-Fu Chien & Chung-Jen Kuo & Chih-Min Yu, 2020. "Tool allocation to smooth work-in-process for cycle time reduction and an empirical study," Annals of Operations Research, Springer, vol. 290(1), pages 1009-1033, July.
- Acciarini, Chiara & Cappa, Francesco & Boccardelli, Paolo & Oriani, Raffaele, 2023. "How can organizations leverage big data to innovate their business models? A systematic literature review," Technovation, Elsevier, vol. 123(C).
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