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Reconfiguring nucleation for CVD growth of twisted bilayer MoS2 with a wide range of twist angles

Author

Listed:
  • Manzhang Xu

    (Northwestern Polytechnical University
    Northwestern Polytechnical University
    Northwestern Polytechnical University)

  • Hongjia Ji

    (Northwestern Polytechnical University)

  • Lu Zheng

    (Northwestern Polytechnical University
    Northwestern Polytechnical University
    Northwestern Polytechnical University)

  • Weiwei Li

    (Northwestern Polytechnical University
    Northwestern Polytechnical University
    Northwestern Polytechnical University)

  • Jing Wang

    (Northwestern Polytechnical University)

  • Hanxin Wang

    (Northwestern Polytechnical University)

  • Lei Luo

    (Northwestern Polytechnical University)

  • Qianbo Lu

    (Northwestern Polytechnical University
    Northwestern Polytechnical University
    Northwestern Polytechnical University)

  • Xuetao Gan

    (Northwestern Polytechnical University)

  • Zheng Liu

    (Nanyang Technological University
    CINTRA CNRS/NTU/THALES, UMI 3288
    Nanyang Technological University)

  • Xuewen Wang

    (Northwestern Polytechnical University
    Northwestern Polytechnical University
    Northwestern Polytechnical University)

  • Wei Huang

    (Northwestern Polytechnical University
    Northwestern Polytechnical University
    Northwestern Polytechnical University
    Nanjing University of Posts & Telecommunications)

Abstract

Twisted bilayer (TB) transition metal dichalcogenides (TMDCs) beyond TB-graphene are considered an ideal platform for investigating condensed matter physics, due to the moiré superlattices-related peculiar band structures and distinct electronic properties. The growth of large-area and high-quality TB-TMDCs with wide twist angles would be significant for exploring twist angle-dependent physics and applications, but remains challenging to implement. Here, we propose a reconfiguring nucleation chemical vapor deposition (CVD) strategy for directly synthesizing TB-MoS2 with twist angles from 0° to 120°. The twist angles-dependent Moiré periodicity can be clearly observed, and the interlayer coupling shows a strong relationship to the twist angles. Moreover, the yield of TB-MoS2 in bilayer MoS2 and density of TB-MoS2 are significantly improved to 17.2% and 28.9 pieces/mm2 by tailoring gas flow rate and molar ratio of NaCl to MoO3. The proposed reconfiguring nucleation approach opens an avenue for the precise growth of TB-TMDCs for both fundamental research and practical applications.

Suggested Citation

  • Manzhang Xu & Hongjia Ji & Lu Zheng & Weiwei Li & Jing Wang & Hanxin Wang & Lei Luo & Qianbo Lu & Xuetao Gan & Zheng Liu & Xuewen Wang & Wei Huang, 2024. "Reconfiguring nucleation for CVD growth of twisted bilayer MoS2 with a wide range of twist angles," Nature Communications, Nature, vol. 15(1), pages 1-12, December.
    • Handle: RePEc:nat:natcom:v:15:y:2024:i:1:d:10.1038_s41467-023-44598-w
    DOI: 10.1038/s41467-023-44598-w
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    References listed on IDEAS

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