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Phase-probability shaping for speckle-free holographic lithography

Author

Listed:
  • Dong Zhao

    (University of Science and Technology of China)

  • Weiwei Fu

    (University of Science and Technology of China
    Anhui University
    Anhui University)

  • Jun He

    (University of Science and Technology of China)

  • Ziqin Li

    (University of Science and Technology of China)

  • Fang-Wen Sun

    (University of Science and Technology of China)

  • Kun Huang

    (University of Science and Technology of China
    Anhui University)

Abstract

Optical holography has undergone rapid development since its invention in 1948, but the accompanying speckles with alternating dark and bright spots of randomly varying shapes are still untamed now due to the intrinsic fluctuations from irregular complex-field superposition. Despite spatial, temporal and spectral averages for speckle reduction, holographic images cannot yet meet the requirement for high-homogeneity, edge-sharp and shape-unlimited features in optical display and lithography. Here we report that holographic speckles can be removed by narrowing the probability density distribution of encoded phase to homogenize optical superposition. Guided by this physical insight, an Adam-gradient-descent probability-shaping (APS) method is developed to prohibit the fluctuations of intensity in a computer-generated hologram (CGH), which empowers the experimental reconstruction of irregular images with ultralow speckle contrast (C = 0.08) and record-high edge sharpness (~1000 mm−1). These well-behaved performances revitalize CGH for lensless lithography, enabling experimental fabrication of arbitrary-shape and edge-sharp patterns with spatial resolution of 0.54λ/NA.

Suggested Citation

  • Dong Zhao & Weiwei Fu & Jun He & Ziqin Li & Fang-Wen Sun & Kun Huang, 2025. "Phase-probability shaping for speckle-free holographic lithography," Nature Communications, Nature, vol. 16(1), pages 1-11, December.
    • Handle: RePEc:nat:natcom:v:16:y:2025:i:1:d:10.1038_s41467-025-64554-0
    DOI: 10.1038/s41467-025-64554-0
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    References listed on IDEAS

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    1. Kun Huang & Hong Liu & Francisco J. Garcia-Vidal & Minghui Hong & Boris Luk’yanchuk & Jinghua Teng & Cheng-Wei Qiu, 2015. "Ultrahigh-capacity non-periodic photon sieves operating in visible light," Nature Communications, Nature, vol. 6(1), pages 1-7, November.
    2. Lingling Huang & Xianzhong Chen & Holger Mühlenbernd & Hao Zhang & Shumei Chen & Benfeng Bai & Qiaofeng Tan & Guofan Jin & Kok-Wai Cheah & Cheng-Wei Qiu & Jensen Li & Thomas Zentgraf & Shuang Zhang, 2013. "Three-dimensional optical holography using a plasmonic metasurface," Nature Communications, Nature, vol. 4(1), pages 1-8, December.
    3. Liang Shi & Beichen Li & Changil Kim & Petr Kellnhofer & Wojciech Matusik, 2021. "Towards real-time photorealistic 3D holography with deep neural networks," Nature, Nature, vol. 591(7849), pages 234-239, March.
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