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Sub-ångström resolution ptychography in a scanning electron microscope at 20 keV

Author

Listed:
  • Arthur M. Blackburn

    (University of Victoria
    University of Victoria)

  • Cristina Cordoba

    (University of Victoria
    University of Victoria)

  • Matthew R. Fitzpatrick

    (University of Victoria
    University of Victoria)

  • Robert A. McLeod

    (Hitachi High-Tech Canada Inc.
    University of Toronto)

Abstract

Achieving sub-ångström ( 30 keV) beam and a transmission electron microscope (TEM) fitted with an aberration corrector and a high efficiency, high pixel-count camera. The cost, space- and personnel-requirements of such TEMs is prohibitive for many laboratories. Low-energy (≤30 keV) scanning electron microscopes (SEMs), in comparison, offer a simpler, more compact, and cost-effective electron microscopy platform. Lower beam energies also have the potential to provide greater information from thin, light-element samples. Here, we demonstrate a sub-ångström resolution of 0.67 Å using a 20 keV SEM operated in transmission mode, enabled by ptychographic reconstruction. This resolution corresponds to a resolution-to-wavelength ratio of 7.8, surpassing previous results from electron ptychography and conventional imaging approaches. The gain in resolution is achieved through a multi-slice ptychographic algorithm incorporating diffraction distortion correction, coupled with a SEM fitted with a cold field emission source, immersion lens, simple projector lens, and a hybrid direct detector optimized for low-energy electrons. This approach holds immediate promise for high-resolution imaging of 2D materials and, with further development, may enable structural studies of small (

Suggested Citation

  • Arthur M. Blackburn & Cristina Cordoba & Matthew R. Fitzpatrick & Robert A. McLeod, 2025. "Sub-ångström resolution ptychography in a scanning electron microscope at 20 keV," Nature Communications, Nature, vol. 16(1), pages 1-11, December.
    • Handle: RePEc:nat:natcom:v:16:y:2025:i:1:d:10.1038_s41467-025-64133-3
    DOI: 10.1038/s41467-025-64133-3
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    References listed on IDEAS

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