IDEAS home Printed from https://ideas.repec.org/a/ibn/masjnl/v3y2009i9p16.html
   My bibliography  Save this article

Optimal Design of Capacitive Micro Cantilever Beam Accelerometer

Author

Listed:
  • Othman Sidek
  • Muhamad Miskam
  • H.M.T Khaleed
  • Mohd Alias
  • Shukri Mohd

Abstract

This study presents the behavior of a micro cantilever beam accelerometer under electrostatic actuation by using the analytical and numerical method. The objective of this study is to determine optimal design of capacitive micro cantilever beam accelerometer in term of reducing the beam deflection with respect to applied acceleration but keeping the distance between electrodes. The structure contains proof mass which is suspended between fixed rigid electrodes to provide differential capacitance measurements. ANSYSÃ’ is used for finite element analysis (FEA) modeling and simulation. The analytical modeling is done by using C programming. Three dimensional modeling is done for six different loading conditions in order to come out with the optimal design. The results obtained from both the analytical and finite element models are found to be in excellent agreement.

Suggested Citation

  • Othman Sidek & Muhamad Miskam & H.M.T Khaleed & Mohd Alias & Shukri Mohd, 2009. "Optimal Design of Capacitive Micro Cantilever Beam Accelerometer," Modern Applied Science, Canadian Center of Science and Education, vol. 3(9), pages 1-16, September.
    • Handle: RePEc:ibn:masjnl:v:3:y:2009:i:9:p:16
    as

    Download full text from publisher

    File URL: https://ccsenet.org/journal/index.php/mas/article/download/3089/3356
    Download Restriction: no
    File URL: https://ccsenet.org/journal/index.php/mas/article/view/3089
    Download Restriction: no
    ---><---

    More about this item

    JEL classification:

    • R00 - Urban, Rural, Regional, Real Estate, and Transportation Economics - - General - - - General
    • Z0 - Other Special Topics - - General

    Statistics

    Access and download statistics

    Corrections

    All material on this site has been provided by the respective publishers and authors. You can help correct errors and omissions. When requesting a correction, please mention this item's handle: RePEc:ibn:masjnl:v:3:y:2009:i:9:p:16. See general information about how to correct material in RePEc.

    If you have authored this item and are not yet registered with RePEc, we encourage you to do it here. This allows to link your profile to this item. It also allows you to accept potential citations to this item that we are uncertain about.

    We have no bibliographic references for this item. You can help adding them by using this form .

    If you know of missing items citing this one, you can help us creating those links by adding the relevant references in the same way as above, for each refering item. If you are a registered author of this item, you may also want to check the "citations" tab in your RePEc Author Service profile, as there may be some citations waiting for confirmation.

    For technical questions regarding this item, or to correct its authors, title, abstract, bibliographic or download information, contact: Canadian Center of Science and Education (email available below). General contact details of provider: https://edirc.repec.org/data/cepflch.html .

    Please note that corrections may take a couple of weeks to filter through the various RePEc services.

    IDEAS is a RePEc service. RePEc uses bibliographic data supplied by the respective publishers.