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Advanced Results for the Design and Fabrication by Bulk Micromachining Technology of Silicon Capacitive Sensors for Biomedical Applications

Author

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  • Florin Gaiseanu

    (Research Professor, Science and Technology of Information Bucharest (Romania) and Barcelona (Spain), Spain)

Abstract

In this paper are shortly presented advanced results on the design and fabrication of the silicon capacitive sensors for biomedical applications, obtained by the Bulk Micromachining (BMM) technology, based on an analytical modeling of the boron diffusion in silicon at high concentrations, suitable to describe both the boron diffusion and etching process of silicon for thin membrane achievement.

Suggested Citation

  • Florin Gaiseanu, 2023. "Advanced Results for the Design and Fabrication by Bulk Micromachining Technology of Silicon Capacitive Sensors for Biomedical Applications," Biomedical Journal of Scientific & Technical Research, Biomedical Research Network+, LLC, vol. 50(5), pages 42073-42078, June.
    • Handle: RePEc:abf:journl:v:50:y:2023:i:5:p:42073-42078
    DOI: 10.26717/BJSTR.2023.50.008015
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