IDEAS home Printed from https://ideas.repec.org/a/nat/natcom/v15y2024i1d10.1038_s41467-024-46743-5.html
   My bibliography  Save this article

Light and matter co-confined multi-photon lithography

Author

Listed:
  • Lingling Guan

    (Zhejiang Lab)

  • Chun Cao

    (Zhejiang University
    Hangzhou Dianzi University)

  • Xi Liu

    (Zhejiang Lab)

  • Qiulan Liu

    (Zhejiang Lab)

  • Yiwei Qiu

    (Zhejiang Lab)

  • Xiaobing Wang

    (Zhejiang Lab)

  • Zhenyao Yang

    (Zhejiang Lab)

  • Huiying Lai

    (Zhejiang Lab)

  • Qiuyuan Sun

    (Zhejiang Lab)

  • Chenliang Ding

    (Zhejiang Lab)

  • Dazhao Zhu

    (Zhejiang Lab)

  • Cuifang Kuang

    (Zhejiang University
    ZJU-Hangzhou Global Scientific and Technological Innovation Center)

  • Xu Liu

    (Zhejiang University
    ZJU-Hangzhou Global Scientific and Technological Innovation Center)

Abstract

Mask-free multi-photon lithography enables the fabrication of arbitrary nanostructures low cost and more accessible than conventional lithography. A major challenge for multi-photon lithography is to achieve ultra-high precision and desirable lateral resolution due to the inevitable optical diffraction barrier and proximity effect. Here, we show a strategy, light and matter co-confined multi-photon lithography, to overcome the issues via combining photo-inhibition and chemical quenchers. We deeply explore the quenching mechanism and photoinhibition mechanism for light and matter co-confined multiphoton lithography. Besides, mathematical modeling helps us better understand that the synergy of quencher and photo-inhibition can gain a narrowest distribution of free radicals. By using light and matter co-confined multiphoton lithography, we gain a 30 nm critical dimension and 100 nm lateral resolution, which further decrease the gap with conventional lithography.

Suggested Citation

  • Lingling Guan & Chun Cao & Xi Liu & Qiulan Liu & Yiwei Qiu & Xiaobing Wang & Zhenyao Yang & Huiying Lai & Qiuyuan Sun & Chenliang Ding & Dazhao Zhu & Cuifang Kuang & Xu Liu, 2024. "Light and matter co-confined multi-photon lithography," Nature Communications, Nature, vol. 15(1), pages 1-11, December.
    • Handle: RePEc:nat:natcom:v:15:y:2024:i:1:d:10.1038_s41467-024-46743-5
    DOI: 10.1038/s41467-024-46743-5
    as

    Download full text from publisher

    File URL: https://www.nature.com/articles/s41467-024-46743-5
    File Function: Abstract
    Download Restriction: no
    File URL: https://libkey.io/10.1038/s41467-024-46743-5?utm_source=ideas
    LibKey link: if access is restricted and if your library uses this service, LibKey will redirect you to where you can use your library subscription to access this item
    ---><---

    References listed on IDEAS

    as
    1. Satoshi Kawata & Hong-Bo Sun & Tomokazu Tanaka & Kenji Takada, 2001. "Finer features for functional microdevices," Nature, Nature, vol. 412(6848), pages 697-698, August.
    2. Yejing Liu & Hao Wang & Jinfa Ho & Ryan C. Ng & Ray J. H. Ng & Valerian H. Hall-Chen & Eleen H. H. Koay & Zhaogang Dong & Hailong Liu & Cheng-Wei Qiu & Julia R. Greer & Joel K. W. Yang, 2019. "Structural color three-dimensional printing by shrinking photonic crystals," Nature Communications, Nature, vol. 10(1), pages 1-8, December.
    Full references (including those not matched with items on IDEAS)

    Most related items

    These are the items that most often cite the same works as this one and are cited by the same works as this one.
    1. Feng Jin & Jie Liu & Yuan-Yuan Zhao & Xian-Zi Dong & Mei-Ling Zheng & Xuan-Ming Duan, 2022. "λ/30 inorganic features achieved by multi-photon 3D lithography," Nature Communications, Nature, vol. 13(1), pages 1-10, December.
    2. Laura Hermans & Murat Kaynak & Jonas Braun & Victor Lobato Ríos & Chin-Lin Chen & Adam Friedberg & Semih Günel & Florian Aymanns & Mahmut Selman Sakar & Pavan Ramdya, 2022. "Microengineered devices enable long-term imaging of the ventral nerve cord in behaving adult Drosophila," Nature Communications, Nature, vol. 13(1), pages 1-15, December.
    3. Keliang Liu & Haibo Ding & Sen Li & Yanfang Niu & Yi Zeng & Junning Zhang & Xin Du & Zhongze Gu, 2022. "3D printing colloidal crystal microstructures via sacrificial-scaffold-mediated two-photon lithography," Nature Communications, Nature, vol. 13(1), pages 1-8, December.
    4. Rongjuan Huang & Yunfei He & Juan Wang & Jindou Zou & Hailan Wang & Haodong Sun & Yuxin Xiao & Dexin Zheng & Jiani Ma & Tao Yu & Wei Huang, 2024. "Tunable afterglow for mechanical self-monitoring 3D printing structures," Nature Communications, Nature, vol. 15(1), pages 1-11, December.
    5. Maxim R. Shcherbakov & Giovanni Sartorello & Simin Zhang & Joshua Bocanegra & Melissa Bosch & Michael Tripepi & Noah Talisa & Abdallah AlShafey & Joseph Smith & Stephen Londo & François Légaré & Enam , 2023. "Nanoscale reshaping of resonant dielectric microstructures by light-driven explosions," Nature Communications, Nature, vol. 14(1), pages 1-9, December.
    6. Yu Zhang & Lidian Zhang & Chengqi Zhang & Jingxia Wang & Junchao Liu & Changqing Ye & Zhichao Dong & Lei Wu & Yanlin Song, 2022. "Continuous resin refilling and hydrogen bond synergistically assisted 3D structural color printing," Nature Communications, Nature, vol. 13(1), pages 1-11, December.
    7. Jiao Geng & Liye Xu & Wei Yan & Liping Shi & Min Qiu, 2023. "High-speed laser writing of structural colors for full-color inkless printing," Nature Communications, Nature, vol. 14(1), pages 1-9, December.
    8. Tomohiro Mori & Hao Wang & Wang Zhang & Chern Chia Ser & Deepshikha Arora & Cheng-Feng Pan & Hao Li & Jiabin Niu & M. A. Rahman & Takeshi Mori & Hideyuki Koishi & Joel K. W. Yang, 2023. "Pick and place process for uniform shrinking of 3D printed micro- and nano-architected materials," Nature Communications, Nature, vol. 14(1), pages 1-9, December.
    9. Wenqi Ouyang & Xiayi Xu & Wanping Lu & Ni Zhao & Fei Han & Shih-Chi Chen, 2023. "Ultrafast 3D nanofabrication via digital holography," Nature Communications, Nature, vol. 14(1), pages 1-9, December.
    10. Zemin Liu & Meng Li & Xiaoguang Dong & Ziyu Ren & Wenqi Hu & Metin Sitti, 2022. "Creating three-dimensional magnetic functional microdevices via molding-integrated direct laser writing," Nature Communications, Nature, vol. 13(1), pages 1-11, December.
    11. Zhi-Yong Hu & Yong-Lai Zhang & Chong Pan & Jian-Yu Dou & Zhen-Ze Li & Zhen-Nan Tian & Jiang-Wei Mao & Qi-Dai Chen & Hong-Bo Sun, 2022. "Miniature optoelectronic compound eye camera," Nature Communications, Nature, vol. 13(1), pages 1-10, December.
    12. Simao Coelho & Jongho Baek & James Walsh & J. Justin Gooding & Katharina Gaus, 2022. "Direct-laser writing for subnanometer focusing and single-molecule imaging," Nature Communications, Nature, vol. 13(1), pages 1-8, December.
    13. Ahmet F. Demirörs & Erik Poloni & Maddalena Chiesa & Fabio L. Bargardi & Marco R. Binelli & Wilhelm Woigk & Lucas D. C. Castro & Nicole Kleger & Fergal B. Coulter & Alba Sicher & Henning Galinski & Fr, 2022. "Three-dimensional printing of photonic colloidal glasses into objects with isotropic structural color," Nature Communications, Nature, vol. 13(1), pages 1-9, December.

    More about this item

    Statistics

    Access and download statistics

    Corrections

    All material on this site has been provided by the respective publishers and authors. You can help correct errors and omissions. When requesting a correction, please mention this item's handle: RePEc:nat:natcom:v:15:y:2024:i:1:d:10.1038_s41467-024-46743-5. See general information about how to correct material in RePEc.

    If you have authored this item and are not yet registered with RePEc, we encourage you to do it here. This allows to link your profile to this item. It also allows you to accept potential citations to this item that we are uncertain about.

    If CitEc recognized a bibliographic reference but did not link an item in RePEc to it, you can help with this form .

    If you know of missing items citing this one, you can help us creating those links by adding the relevant references in the same way as above, for each refering item. If you are a registered author of this item, you may also want to check the "citations" tab in your RePEc Author Service profile, as there may be some citations waiting for confirmation.

    For technical questions regarding this item, or to correct its authors, title, abstract, bibliographic or download information, contact: Sonal Shukla or Springer Nature Abstracting and Indexing (email available below). General contact details of provider: http://www.nature.com .

    Please note that corrections may take a couple of weeks to filter through the various RePEc services.

    IDEAS is a RePEc service. RePEc uses bibliographic data supplied by the respective publishers.