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Sub-volt high-speed silicon MOSCAP microring modulator driven by high-mobility conductive oxide

Author

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  • Wei-Che Hsu

    (Oregon State University
    Baylor University)

  • Nabila Nujhat

    (Oregon State University)

  • Benjamin Kupp

    (Oregon State University)

  • John F. Conley

    (Oregon State University)

  • Haisheng Rong

    (Intel Corporation, 3600 Juliette Ln)

  • Ranjeet Kumar

    (Intel Corporation, 3600 Juliette Ln)

  • Alan X. Wang

    (Oregon State University
    Baylor University)

Abstract

Silicon microring modulator plays a critical role in energy-efficient optical interconnect and optical computing owing to its ultra-compact footprint and capability for on-chip wavelength-division multiplexing. However, existing silicon microring modulators usually require more than 2 V of driving voltage (Vpp), which is limited by both material properties and device structures. Here, we present a metal-oxide-semiconductor capacitor microring modulator through heterogeneous integration between silicon photonics and titanium-doped indium oxide, which is a high-mobility transparent conductive oxide (TCO) with a strong plasma dispersion effect. The device is co-fabricated by Intel’s photonics fab and our in-house TCO patterning processes, which exhibits a high modulation efficiency of 117 pm/V and consequently can be driven by a very low Vpp of 0.8 V. At a 11 GHz modulation bandwidth where the modulator is limited by the RC bandwidth, we obtained 25 Gb/s clear eye diagrams with energy efficiency of 53 fJ/bit.

Suggested Citation

  • Wei-Che Hsu & Nabila Nujhat & Benjamin Kupp & John F. Conley & Haisheng Rong & Ranjeet Kumar & Alan X. Wang, 2024. "Sub-volt high-speed silicon MOSCAP microring modulator driven by high-mobility conductive oxide," Nature Communications, Nature, vol. 15(1), pages 1-9, December.
    • Handle: RePEc:nat:natcom:v:15:y:2024:i:1:d:10.1038_s41467-024-45130-4
    DOI: 10.1038/s41467-024-45130-4
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    References listed on IDEAS

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    1. Qianfan Xu & Bradley Schmidt & Sameer Pradhan & Michal Lipson, 2005. "Micrometre-scale silicon electro-optic modulator," Nature, Nature, vol. 435(7040), pages 325-327, May.
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