IDEAS home Printed from https://ideas.repec.org/a/eee/renene/v33y2008i2p226-231.html
   My bibliography  Save this article

The effect of annealing on the properties of diamond-like carbon protective antireflection coatings

Author

Listed:
  • Choi, Won Seok
  • Hong, Byungyou

Abstract

In addition to its similarity to genuine diamond film, diamond-like carbon (DLC) film has many advantages, including its wide band gap and variable refractive index. Therefore, as one of the diverse applications, DLC film can be utilized as a protective coating for IR windows and an anti-reflective coating for solar cells. For this study, DLC films were prepared by the radio frequency-plasma enhanced chemical vapor deposition (RF-PECVD) method on silicon substrates using methane (CH4) and hydrogen (H2) gas. We examined the effects of the post-annealing temperature and the annealing ambient on structural, electrical and optical properties of DLC films. The films were annealed at temperatures ranging from 300 to 900°C in steps of 200°C using rapid thermal annealing equipment in nitrogen ambients. The thickness of the film was observed by scanning electron microscopy (SEM) and surface profile analysis. The variation of structure according to the annealing treatment was examined using Raman spectroscopy, X-ray photoelectron spectroscopy (XPS) and high-resolution transmission electron microscopy (HRTEM). The reflectance of DLC thin film was investigated by UV–vis spectrometry and its electrical properties were investigated using a four point probe and I–V meter. The carrier lifetime of the film was also checked.

Suggested Citation

  • Choi, Won Seok & Hong, Byungyou, 2008. "The effect of annealing on the properties of diamond-like carbon protective antireflection coatings," Renewable Energy, Elsevier, vol. 33(2), pages 226-231.
    • Handle: RePEc:eee:renene:v:33:y:2008:i:2:p:226-231
    DOI: 10.1016/j.renene.2007.05.022
    as

    Download full text from publisher

    File URL: http://www.sciencedirect.com/science/article/pii/S0960148107001528
    Download Restriction: Full text for ScienceDirect subscribers only
    File URL: https://libkey.io/10.1016/j.renene.2007.05.022?utm_source=ideas
    LibKey link: if access is restricted and if your library uses this service, LibKey will redirect you to where you can use your library subscription to access this item
    ---><---

    As the access to this document is restricted, you may want to search for a different version of it.

    Corrections

    All material on this site has been provided by the respective publishers and authors. You can help correct errors and omissions. When requesting a correction, please mention this item's handle: RePEc:eee:renene:v:33:y:2008:i:2:p:226-231. See general information about how to correct material in RePEc.

    If you have authored this item and are not yet registered with RePEc, we encourage you to do it here. This allows to link your profile to this item. It also allows you to accept potential citations to this item that we are uncertain about.

    We have no bibliographic references for this item. You can help adding them by using this form .

    If you know of missing items citing this one, you can help us creating those links by adding the relevant references in the same way as above, for each refering item. If you are a registered author of this item, you may also want to check the "citations" tab in your RePEc Author Service profile, as there may be some citations waiting for confirmation.

    For technical questions regarding this item, or to correct its authors, title, abstract, bibliographic or download information, contact: Catherine Liu (email available below). General contact details of provider: http://www.journals.elsevier.com/renewable-energy .

    Please note that corrections may take a couple of weeks to filter through the various RePEc services.

    IDEAS is a RePEc service. RePEc uses bibliographic data supplied by the respective publishers.