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Preparation of A1/A1N cermet film by co-sputtering; structural aspects and optical properties

Author

Listed:
  • Berthier, S.
  • Fagnent, S.
  • Sauques, L.
  • Sainte Catherine, M.C.
  • Sella, C.

Abstract

Aluminum/aluminiu nitride (A1/A1N) cerment films have been deposited by radio-frequency cosputtering. Determination of percolation threshold qc = 0.22 was derived from microstructural analysis and conductivity measurements. SIMS measurements also revealed inhomogeneities of atomic composition versus depth profile. Optical properties have been reported both in the mid-infrared and partly visible range. Comparison with a model using multilayer-films and Bruggeman model have been made. In the end, the influence of surface roughness on reflectance behaviour is also discussed. For more details, an article on Al-A1N microstructure will be published in a forthcoming paper.

Suggested Citation

  • Berthier, S. & Fagnent, S. & Sauques, L. & Sainte Catherine, M.C. & Sella, C., 1997. "Preparation of A1/A1N cermet film by co-sputtering; structural aspects and optical properties," Physica A: Statistical Mechanics and its Applications, Elsevier, vol. 241(1), pages 138-145.
    • Handle: RePEc:eee:phsmap:v:241:y:1997:i:1:p:138-145
    DOI: 10.1016/S0378-4371(97)00073-3
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