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A time-varying weights tuning method of the double EWMA controller

Author

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  • Su, Chao-Ton
  • Hsu, Chun-Chin

Abstract

In recent years, the exponential-weighted-moving-average (EWMA) statistic based controllers are popular in semiconductor manufacturing. However, the single EWMA controller is not sufficient for compensating for the wear-out process. Thus, a double EWMA controller was proposed to enhance the capability for controlling the drifting process. In the literatures, in the solution of the double EWMA controller, only the "trade-off" solution weights are used to tune the controller. However, it is a fixed weight tuning method, and it is known that a time-varying weight will produce a superior performance over that of a fixed one (J. Quality Technol. 29 (1997) 184). Therefore, this study aims to develop a heuristic time-varying weights tuning method for the double EWMA controller. The numerical results showed that the proposed time-varying tuning method possesses an improvement of least 10% over that of the fixed weight scheme.

Suggested Citation

  • Su, Chao-Ton & Hsu, Chun-Chin, 2004. "A time-varying weights tuning method of the double EWMA controller," Omega, Elsevier, vol. 32(6), pages 473-480, December.
    • Handle: RePEc:eee:jomega:v:32:y:2004:i:6:p:473-480
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