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A novel method to achieve selective emitter for silicon solar cell using low cost pattern-able a-Si thin films as the semi-transparent phosphorus diffusion barrier

Author

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  • Chen, Da Ming
  • Liang, Zong Cun
  • Zhuang, Lin
  • Lin, Yang Huan
  • Shen, Hui

Abstract

Selective emitter for silicon solar cell was realized by employing a-Si thin films as the semi-transparent diffusion barrier. The a-Si thin films with various thicknesses (∼10–40nm) were deposited by the electron-beam evaporation technique. Emitters with sheet resistances from 37 to 145Ω/□ were obtained via POCl3 diffusion process. The thickness of the a-Si diffusion barrier was optimized to be 15nm for selective emitter in our work. Homemade mask which can dissolve in ethanol was screen-printed on a-Si film to make pattern. The a-Si film was then patterned in KOH solution to form finger-like design. Selective emitter was obtainable with one-step diffusion with patterned a-Si film on. Combinations of sheet resistances for the high-/low-level doped regions of 39.8/112.1, 36.2/88.8, 35.4/73.9 were obtained. These combinations are suitable for screen-printed solar cells. This preparation method of selective emitter based on a-Si diffusion barrier is a promising approach for low cost industrial manufacturing.

Suggested Citation

  • Chen, Da Ming & Liang, Zong Cun & Zhuang, Lin & Lin, Yang Huan & Shen, Hui, 2012. "A novel method to achieve selective emitter for silicon solar cell using low cost pattern-able a-Si thin films as the semi-transparent phosphorus diffusion barrier," Applied Energy, Elsevier, vol. 92(C), pages 315-321.
  • Handle: RePEc:eee:appene:v:92:y:2012:i:c:p:315-321
    DOI: 10.1016/j.apenergy.2011.10.033
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    Cited by:

    1. Chen, Ze & Zhang, Xiao-dan & Fang, Jia & Liang, Jun-hui & Liang, Xue-jiao & Sun, Jian & Zhang, De-kun & Wang, Ning & Zhao, Hui-xu & Chen, Xin-liang & Huang, Qian & Wei, Chang-chun & Zhao, Ying, 2014. "Enhancement in electrical performance of thin-film silicon solar cells based on a micro- and nano-textured zinc oxide electrodes," Applied Energy, Elsevier, vol. 135(C), pages 158-164.
    2. Che, Quande & Yang, Hongxing & Lu, Lin & Wang, Yuanhao, 2013. "Preparation of lead-free nanoglass frit powder for crystalline silicon solar cells," Applied Energy, Elsevier, vol. 112(C), pages 657-662.

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