IDEAS home Printed from https://ideas.repec.org/h/spr/sprchp/978-981-32-9531-5_1.html
   My bibliography  Save this book chapter

A New Mathematical Model for a Membrane MEMS Device

In: Transactions on Engineering Technologies

Author

Listed:
  • Luisa Fattorusso

    (Cittadella Universitaria, “Mediterranea” University, DIIES Department)

  • Mario Versaci

    (Cittadella Universitaria, “Mediterranea” University, DICEAM Department)

Abstract

The membrane MEMSs represent a good design solution for the industry requirements about the construction of micro-dimensional devices, because easily constructible and extremely versatile. In this domain, the experience of the authors in the modeling of membrane MEMS devices has matured. In this chapter, they present a formalization of stationary 1D-membrane MEMS in which the electric field magnitude, |E|, is proportional to the curvature of the membrane, C, obtaining a semilinear elliptic model. Next, techniques based on fixed point Theorems provide results of existence, while an approach based on the joint use of Poincaré’s inequality and Gronwall’s Lemma establish conditions of uniqueness. Finally, some numerical tests complete the work.

Suggested Citation

  • Luisa Fattorusso & Mario Versaci, 2019. "A New Mathematical Model for a Membrane MEMS Device," Springer Books, in: Sio-Iong Ao & Len Gelman & Haeng Kon Kim (ed.), Transactions on Engineering Technologies, chapter 0, pages 1-17, Springer.
    • Handle: RePEc:spr:sprchp:978-981-32-9531-5_1
    DOI: 10.1007/978-981-32-9531-5_1
    as

    Download full text from publisher

    To our knowledge, this item is not available for download. To find whether it is available, there are three options:
    1. Check below whether another version of this item is available online.
    2. Check on the provider's web page whether it is in fact available.
    3. Perform a
    for a similarly titled item that would be available.

    More about this item

    Keywords

    ;
    ;
    ;
    ;
    ;

    Statistics

    Access and download statistics

    Corrections

    All material on this site has been provided by the respective publishers and authors. You can help correct errors and omissions. When requesting a correction, please mention this item's handle: RePEc:spr:sprchp:978-981-32-9531-5_1. See general information about how to correct material in RePEc.

    If you have authored this item and are not yet registered with RePEc, we encourage you to do it here. This allows to link your profile to this item. It also allows you to accept potential citations to this item that we are uncertain about.

    We have no bibliographic references for this item. You can help adding them by using this form .

    If you know of missing items citing this one, you can help us creating those links by adding the relevant references in the same way as above, for each refering item. If you are a registered author of this item, you may also want to check the "citations" tab in your RePEc Author Service profile, as there may be some citations waiting for confirmation.

    For technical questions regarding this item, or to correct its authors, title, abstract, bibliographic or download information, contact: Sonal Shukla or Springer Nature Abstracting and Indexing (email available below). General contact details of provider: http://www.springer.com .

    Please note that corrections may take a couple of weeks to filter through the various RePEc services.

    IDEAS is a RePEc service. RePEc uses bibliographic data supplied by the respective publishers.