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Statistical Process Control for Semiconductor Manufacturing Processes

In: Frontiers in Statistical Quality Control 9

Author

Listed:
  • Masanobu Higashide

    (NEC Electronics Corp)

  • Ken Nishina

    (Nagoya Institute of Technology)

  • Hironobu Kawamura

    (Nagoya Institute of Technology)

  • Naru Ishii

    (Nagoya Institute of Technology)

Abstract

Summary This paper considers statistical process control (SPC) for the semiconductor manufacuturing industry, where automatic process adjustment and process maintenance are widely used. However, SPC has been developed in parts industry an, thus, application of SPC to chemical processes such as those in the semiconductor manufacuturinghas not been systematically investigated Two case studies are presented; one is an example for process adjustment and the other is an example for process maintenance. Either of them is based on control charts and it is discussed how to take into account process autocorrelation.

Suggested Citation

  • Masanobu Higashide & Ken Nishina & Hironobu Kawamura & Naru Ishii, 2010. "Statistical Process Control for Semiconductor Manufacturing Processes," Springer Books, in: Hans-Joachim Lenz & Peter-Theodor Wilrich & Wolfgang Schmid (ed.), Frontiers in Statistical Quality Control 9, pages 71-84, Springer.
    • Handle: RePEc:spr:sprchp:978-3-7908-2380-6_5
    DOI: 10.1007/978-3-7908-2380-6_5
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