IDEAS home Printed from https://ideas.repec.org/h/spr/sprchp/978-3-642-59709-1_15.html
   My bibliography  Save this book chapter

The Oxidation Process of Silicon

In: Lectures on Applied Mathematics

Author

Listed:
  • W. Merz

    (Technische Universität München, Zentrum Mathematik)

Abstract

In electronic devices the electrical insulation of different areas is often achieved by layers of silicon-dioxide. These are usually created by exposing the silicon wafers at process temperatures between 700–1200°C to a gas flow containing oxygen or to a stream. Using different oxygen isotrops tracer experiments have shown that the new oxide is created at the interface between silicon and silicon-dioxide.

Suggested Citation

  • W. Merz, 2000. "The Oxidation Process of Silicon," Springer Books, in: Hans-Joachim Bungartz & Ronald H. W. Hoppe & Christoph Zenger (ed.), Lectures on Applied Mathematics, pages 217-231, Springer.
    • Handle: RePEc:spr:sprchp:978-3-642-59709-1_15
    DOI: 10.1007/978-3-642-59709-1_15
    as

    Download full text from publisher

    To our knowledge, this item is not available for download. To find whether it is available, there are three options:
    1. Check below whether another version of this item is available online.
    2. Check on the provider's web page whether it is in fact available.
    3. Perform a
    for a similarly titled item that would be available.

    More about this item

    Keywords

    ;
    ;
    ;
    ;
    ;

    Statistics

    Access and download statistics

    Corrections

    All material on this site has been provided by the respective publishers and authors. You can help correct errors and omissions. When requesting a correction, please mention this item's handle: RePEc:spr:sprchp:978-3-642-59709-1_15. See general information about how to correct material in RePEc.

    If you have authored this item and are not yet registered with RePEc, we encourage you to do it here. This allows to link your profile to this item. It also allows you to accept potential citations to this item that we are uncertain about.

    We have no bibliographic references for this item. You can help adding them by using this form .

    If you know of missing items citing this one, you can help us creating those links by adding the relevant references in the same way as above, for each refering item. If you are a registered author of this item, you may also want to check the "citations" tab in your RePEc Author Service profile, as there may be some citations waiting for confirmation.

    For technical questions regarding this item, or to correct its authors, title, abstract, bibliographic or download information, contact: Sonal Shukla or Springer Nature Abstracting and Indexing (email available below). General contact details of provider: http://www.springer.com .

    Please note that corrections may take a couple of weeks to filter through the various RePEc services.

    IDEAS is a RePEc service. RePEc uses bibliographic data supplied by the respective publishers.