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Numerical Solution of a Nonlinear Evolution Equation Describing Amorphous Surface Growth of Thin Films

In: Numerical Mathematics and Advanced Applications

Author

Listed:
  • Ronald H.W. Hoppe

    (University of Houston, Department of Mathematics
    University of Augsburg, Institute for Mathematics)

  • Eva Nash

    (Infineon Technologies AG)

Abstract

Summary We consider a nonlinear parabolic partial differential equation that describes the evolution of the surface morphology in the deposition of thin glassy films by molecular beam epitaxy. The dynamics of the growth process exhibits some unexpected initial linear behavior, before the nonlinear dynamics sets in. Therefore, for the numerical solution we suggest a combined spectral element/finite element approach. Results of numerical simulations are given that show a good agreement with experimental measurements.

Suggested Citation

  • Ronald H.W. Hoppe & Eva Nash, 2004. "Numerical Solution of a Nonlinear Evolution Equation Describing Amorphous Surface Growth of Thin Films," Springer Books, in: Miloslav Feistauer & Vít Dolejší & Petr Knobloch & Karel Najzar (ed.), Numerical Mathematics and Advanced Applications, pages 440-448, Springer.
    • Handle: RePEc:spr:sprchp:978-3-642-18775-9_41
    DOI: 10.1007/978-3-642-18775-9_41
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