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An Improved Method to Detect Riblets on Surfaces in Nanometer Scaling Using SEM

In: From Nano to Space

Author

Listed:
  • E. Reithmeier

    (Institute of Measurement and Automatic Control)

  • T. Vynnyk

    (Institute of Measurement and Automatic Control)

Abstract

An improved photometric method for recording a 3D-microtopogrpahy of technical surfaces will be presented. The suggested procedure employs a scanning electron microscope (SEM) as multi-detector system. The improvement in measurement is based on an extended model of the electron detection in order to evaluate the detectors signals in a different way compared to known approaches. The method will be applied on a calibration sphere in order to demonstrate the accuracy of the current approach.

Suggested Citation

  • E. Reithmeier & T. Vynnyk, 2008. "An Improved Method to Detect Riblets on Surfaces in Nanometer Scaling Using SEM," Springer Books, in: Michael H. Breitner & Georg Denk & Peter Rentrop (ed.), From Nano to Space, pages 43-54, Springer.
    • Handle: RePEc:spr:sprchp:978-3-540-74238-8_5
    DOI: 10.1007/978-3-540-74238-8_5
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