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ParChem: Efficient Numerical Methods for Chemical Problems related to MOVPE

In: High Performance Computing in Science and Engineering, Garching 2004

Author

Listed:
  • E. Mesic

    (University of Erlangen-Nürnberg, Institute of Fluid Mechanics)

  • M. Mukinovic

    (TU-Clausthal, Institute of Applied Mechanics)

  • L. Kadinski

    (University of Erlangen-Nürnberg, Institute of Fluid Mechanics)

  • G. Brenner

    (University of Erlangen-Nürnberg, Institute of Fluid Mechanics)

Abstract

The prediction of MOVPE processes requires the modeling of numerous coupled transport phenomena for momentum, mass and heat including temperature dependent physical properties and chemical reactions. In the present paper, the numerical simulation is used as a tool to identify and distinguish systematically the chemical parameters in the AlGaN growth process in order to obtain a reliable and efficient prediction of the process.

Suggested Citation

  • E. Mesic & M. Mukinovic & L. Kadinski & G. Brenner, 2005. "ParChem: Efficient Numerical Methods for Chemical Problems related to MOVPE," Springer Books, in: Arndt Bode & Franz Durst (ed.), High Performance Computing in Science and Engineering, Garching 2004, pages 51-62, Springer.
    • Handle: RePEc:spr:sprchp:978-3-540-28555-7_5
    DOI: 10.1007/3-540-28555-5_5
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