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Effects Of Electrode Distance On Mechanical And Tribological Properties Of Hydrogenated Dlc Films Deposited By Dc-Pulse Pecvd

Author

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  • KUN-YAO WU

    (School of Materials Engineering, Xi’an Aeronautical University, Xi’an 710077, P. R. China)

  • GENG-RUI ZHAO

    (#x2020;State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, P, R, China)

  • ZHAO LI

    (School of Materials Engineering, Xi’an Aeronautical University, Xi’an 710077, P. R. China)

  • ZHEN-BIN GONG

    (#x2020;State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, P, R, China)

Abstract

Hydrogenated diamond-like carbon (DLC) films were deposited by DC-pulse plasma-enhanced chemical vapor deposition (PECVD) under the different electrode distances. Effects of the electrode distances on the microstructural, mechanical, and tribological properties of the obtained films were investigated by high-resolution transmission electron microscopy (HRTEM), selected area electron diffraction (SAED), Raman spectrum, Fourier transform infrared spectroscopy (FTIR), nano-indenter, and reciprocating ball-on-disc tester, respectively. The results indicate that the thickness of the films decreased with the increased electrodes distances. The films have the highest internal stress, highest hydrogen concentration, and lowest friction coefficient at the 54mm electrode distance, which are resulted from the highest sp3 content formed at this feature distance. The wear rates also have similar variations. The film formed at 54mm distance also shows the lowest hardness and elastic modulus with values of 6.2 and 29.1GPa.

Suggested Citation

  • Kun-Yao Wu & Geng-Rui Zhao & Zhao Li & Zhen-Bin Gong, 2021. "Effects Of Electrode Distance On Mechanical And Tribological Properties Of Hydrogenated Dlc Films Deposited By Dc-Pulse Pecvd," Surface Review and Letters (SRL), World Scientific Publishing Co. Pte. Ltd., vol. 28(02), pages 1-10, February.
    • Handle: RePEc:wsi:srlxxx:v:28:y:2021:i:02:n:s0218625x20500456
    DOI: 10.1142/S0218625X20500456
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