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Surface Finishing Of Nanoscratch Patterns On Coated Pyrex Glasses Using Maf

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  • SEOUNG HWAN LEE

    (Department of Mechanical Engineering, Hanyang University, #1271 Sa 1-Dong, Ansan, Kyunggi-Do 425-791, South Korea)

Abstract

We investigate a surface finishing scheme fitted for AFM scratched nanopatterns on a coated surface using magnetic abrasive finishing (MAF). First, nanoscale patterning was carried out on IZO-coated Pyrex glass, with a specially-designed AFM machining setup. After AFM machining, nonuniform surface features such as pile-ups are generated, and the final shapes are often more complicated for coated materials. For this reason, MAF was implemented for the nanoscale removal of pile-up/debris of coated materials and design of experiment (DOE) was utilized to obtain optimal process conditions for the finishing process.The process was monitored using acoustic emission (AE) for coating-substrate (glass) boundary detection, as well for monitoring the polishing status/depth. Experimental results indicate the viability of the proposed scheme as a nanoscale selective finishing technique for various material setups.

Suggested Citation

  • Seoung Hwan Lee, 2017. "Surface Finishing Of Nanoscratch Patterns On Coated Pyrex Glasses Using Maf," Surface Review and Letters (SRL), World Scientific Publishing Co. Pte. Ltd., vol. 24(04), pages 1-11, June.
    • Handle: RePEc:wsi:srlxxx:v:24:y:2017:i:04:n:s0218625x17500433
    DOI: 10.1142/S0218625X17500433
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