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CHARACTERISTICS OFTiNiTHIN FILMS DEPOSITED BY MAGNETRON SPUTTERING SYSTEM WITH OPTICAL EMISSION SPECTROSCOPY MONITOR

Author

Listed:
  • ERQIANG LIU

    (Institute of Applied Mechanics and Biomedical Engineering, Taiyuan University of Technology, Taiyuan 030024, P. R. China)

  • MINGDONG BAO

    (Institute of Materials Engineering, Ningbo University of Technology, Ningbo 315016, P. R. China)

  • GUOZHENG YUAN

    (Institute of Applied Mechanics and Biomedical Engineering, Taiyuan University of Technology, Taiyuan 030024, P. R. China)

  • GESHENG XIAO

    (Institute of Applied Mechanics and Biomedical Engineering, Taiyuan University of Technology, Taiyuan 030024, P. R. China)

  • TAO JIN

    (Institute of Applied Mechanics and Biomedical Engineering, Taiyuan University of Technology, Taiyuan 030024, P. R. China)

  • ZHIGANG LI

    (Institute of Applied Mechanics and Biomedical Engineering, Taiyuan University of Technology, Taiyuan 030024, P. R. China)

  • XUEFENG SHU

    (Institute of Applied Mechanics and Biomedical Engineering, Taiyuan University of Technology, Taiyuan 030024, P. R. China)

Abstract

TiNicomposite thin films were fabricated using a closed-field unbalanced magnetron sputtering system equipped with optical emission spectroscopy monitor (OEM). The thin films were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), and nanoindentation. Results show that theTiNifilms are amorphous, and their composition varies approximately linearly with the OEM value. Thus, the film composition could be controlled byin situreal-time OEM. The structure of the single B2 parent phase was observed in the annealedTiNifilm. The hardness and elastic modulus of the films increased because of the precipitation of theTi3Ni4phase in the single B2 parent phase.

Suggested Citation

  • Erqiang Liu & Mingdong Bao & Guozheng Yuan & Gesheng Xiao & Tao Jin & Zhigang Li & Xuefeng Shu, 2015. "CHARACTERISTICS OFTiNiTHIN FILMS DEPOSITED BY MAGNETRON SPUTTERING SYSTEM WITH OPTICAL EMISSION SPECTROSCOPY MONITOR," Surface Review and Letters (SRL), World Scientific Publishing Co. Pte. Ltd., vol. 22(05), pages 1-8.
    • Handle: RePEc:wsi:srlxxx:v:22:y:2015:i:05:n:s0218625x15500638
    DOI: 10.1142/S0218625X15500638
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