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EFFECT OF SUBSTRATE TEMPERATURE ON MICROSTRUCTURE AND WEAR BEHAVIOR OF MAGNETRON SPUTTEREDCrCuNFILMS

Author

Listed:
  • SHUYONG TAN

    (Department of Materials Science and Engineering, Nanjing Institute of Technology, Nanjing 211167, P. R. China)

  • XUHAI ZHANG

    (School of Material Science and Engineering, Southeast University, Nanjing 211189, P. R. China)

  • YAN ZHANG

    (Department of Materials Science and Engineering, Nanjing Institute of Technology, Nanjing 211167, P. R. China)

  • JIANQING JIANG

    (School of Material Science and Engineering, Southeast University, Nanjing 211189, P. R. China)

Abstract

CrCuNfilms were deposited under different substrate temperatures by direct current (DC) magnetron sputtering. The structure and wear resistance of the films were then studied. The substrate temperature has almost no effect on the film composition, phase constitution and preferred orientation. TheCrCuNfilms have 3 at.%Cuand consist ofCrNphases withCrN(200)preferential growth independent of the substrate temperature. But a strong effect of the substrate temperature on the wear behavior is noticed. The film prepared under the substrate temperature of 100°C has the best wear performance. Its friction coefficient and wear rate are 0.1 and 6.6 × 10-6mm3/Nm, respectively.

Suggested Citation

  • Shuyong Tan & Xuhai Zhang & Yan Zhang & Jianqing Jiang, 2013. "EFFECT OF SUBSTRATE TEMPERATURE ON MICROSTRUCTURE AND WEAR BEHAVIOR OF MAGNETRON SPUTTEREDCrCuNFILMS," Surface Review and Letters (SRL), World Scientific Publishing Co. Pte. Ltd., vol. 20(06), pages 1-7.
    • Handle: RePEc:wsi:srlxxx:v:20:y:2013:i:06:n:s0218625x13500613
    DOI: 10.1142/S0218625X13500613
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