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THICKNESS DEPENDENCE OF BUCKLING PATTERNS OFTaFILMS SPUTTERED ON GLASS SUBSTRATES

Author

Listed:
  • YONG-JU ZHANG

    (Department of Physics, Taizhou University, Linhai 317000, P. R. China)

  • SEN-JIANG YU

    (Department of Physics, China Jiliang University, Hangzhou 310018, P. R. China)

  • HONG ZHOU

    (Department of Physics, China Jiliang University, Hangzhou 310018, P. R. China)

  • MIAO-GEN CHEN

    (Department of Physics, China Jiliang University, Hangzhou 310018, P. R. China)

  • ZHI-WEI JIAO

    (Department of Physics, China Jiliang University, Hangzhou 310018, P. R. China)

Abstract

Tantalum (Ta) films deposited on glass substrates have been prepared by a direct current magnetron sputtering method, and buckling patterns induced by residual compressive stress are investigated in detail. When the film thickness increases, the buckling morphologies evolve from straight-sided buckle network to wavy or wormlike wrinkles gradually, and finally change into telephone cord buckles. The geometrical parameters of the buckling patterns are found to increase linearly with the film thickness. Based on the geometrical parameters of the buckling patterns, the mechanical properties of theTafilms are also discussed in the frame of continuum elastic theory.

Suggested Citation

  • Yong-Ju Zhang & Sen-Jiang Yu & Hong Zhou & Miao-Gen Chen & Zhi-Wei Jiao, 2012. "THICKNESS DEPENDENCE OF BUCKLING PATTERNS OFTaFILMS SPUTTERED ON GLASS SUBSTRATES," Surface Review and Letters (SRL), World Scientific Publishing Co. Pte. Ltd., vol. 19(03), pages 1-5.
    • Handle: RePEc:wsi:srlxxx:v:19:y:2012:i:03:n:s0218625x12500229
    DOI: 10.1142/S0218625X12500229
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    References listed on IDEAS

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    1. A. Khater & M. Belhadi, 2009. "Phonon Scattering Via An Atomic Well In Free Standing Thin Solid Films," Surface Review and Letters (SRL), World Scientific Publishing Co. Pte. Ltd., vol. 16(02), pages 271-280.
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