IDEAS home Printed from https://ideas.repec.org/a/wsi/srlxxx/v18y2011i01n02ns0218625x11014461.html
   My bibliography  Save this article

Statistical Analysis Of Femtosecond Pulses Laser On Hole Drilling Of Silicon Wafer

Author

Listed:
  • L. JIAO

    (School of Mechanical and Aerospace Engineering, College of Engineering, Nanyang Technological University, 50 Nanyang Avenue 639798, Singapore)

  • E. Y. K. NG

    (School of Mechanical and Aerospace Engineering, College of Engineering, Nanyang Technological University, 50 Nanyang Avenue 639798, Singapore)

  • H. ZHENG

    (Singapore Institute of Manufacturing Technology, A*Star, 71 Nanyang Drive 638075, Singapore)

  • L. M. WEE

    (Singapore Institute of Manufacturing Technology, A*Star, 71 Nanyang Drive 638075, Singapore)

Abstract

This study investigated the relationship and parameters interactions between five independent variables in laser percussion drilling of micro-hole. Experiments were conducted on single crystal silicon wafer with material thickness of 725 μm using femtosecond (fs) laser with wavelength of 775 nm and pulse duration of 200 fs. Laser power, focus position, number of pulses, workpiece temperature and assist liquid were selected as independent process variables. Taguchi L18 orthogonal array was applied to design the experiments. The drilling process was evaluated in terms of entrance hole diameter and exit hole diameter. The analysis of the variance (ANOVA) was used to determine the significant parameters that are affecting the entrance hole diameter and exit hole diameter. The result shows that laser power and focus position has highly significant effect on entrance hole diameter. The number of pulses, focus position and assist liquid however has highly significant effect on exit hole diameter.

Suggested Citation

  • L. Jiao & E. Y. K. Ng & H. Zheng & L. M. Wee, 2011. "Statistical Analysis Of Femtosecond Pulses Laser On Hole Drilling Of Silicon Wafer," Surface Review and Letters (SRL), World Scientific Publishing Co. Pte. Ltd., vol. 18(01n02), pages 39-45.
    • Handle: RePEc:wsi:srlxxx:v:18:y:2011:i:01n02:n:s0218625x11014461
    DOI: 10.1142/S0218625X11014461
    as

    Download full text from publisher

    File URL: http://www.worldscientific.com/doi/abs/10.1142/S0218625X11014461
    Download Restriction: Access to full text is restricted to subscribers
    File URL: https://libkey.io/10.1142/S0218625X11014461?utm_source=ideas
    LibKey link: if access is restricted and if your library uses this service, LibKey will redirect you to where you can use your library subscription to access this item
    ---><---

    As the access to this document is restricted, you may want to

    for a different version of it.

    More about this item

    Keywords

    ;
    ;
    ;
    ;

    Statistics

    Access and download statistics

    Corrections

    All material on this site has been provided by the respective publishers and authors. You can help correct errors and omissions. When requesting a correction, please mention this item's handle: RePEc:wsi:srlxxx:v:18:y:2011:i:01n02:n:s0218625x11014461. See general information about how to correct material in RePEc.

    If you have authored this item and are not yet registered with RePEc, we encourage you to do it here. This allows to link your profile to this item. It also allows you to accept potential citations to this item that we are uncertain about.

    We have no bibliographic references for this item. You can help adding them by using this form .

    If you know of missing items citing this one, you can help us creating those links by adding the relevant references in the same way as above, for each refering item. If you are a registered author of this item, you may also want to check the "citations" tab in your RePEc Author Service profile, as there may be some citations waiting for confirmation.

    For technical questions regarding this item, or to correct its authors, title, abstract, bibliographic or download information, contact: Tai Tone Lim (email available below). General contact details of provider: http://www.worldscinet.com/srl/srl.shtml .

    Please note that corrections may take a couple of weeks to filter through the various RePEc services.

    IDEAS is a RePEc service. RePEc uses bibliographic data supplied by the respective publishers.