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Large Area Parallel Surface Nanostructuring With Laser Irradiation Through Microlens Arrays

Author

Listed:
  • C. S. LIM

    (Department of Mechanical Engineering, National University of Singapore, Engineering Drive 3, Singapore 117576, Singapore)

  • M. H. HONG

    (Data Storage Institute, Agency for Science, Technology and Research, DSI Building, 5 Engineering Drive 1, Singapore 117608, Singapore;
    Department of Electrical and Computer Engineering, National University of Singapore, Engineering Drive 3, Singapore 117576, Singapore)

  • Y. LIN

    (Department of Electrical and Computer Engineering, National University of Singapore, Engineering Drive 3, Singapore 117576, Singapore;
    Nanoscience and Nanotechnology Initiative, National University of Singapore, Engineering Drive 3, Singapore 117576, Singapore)

  • L. S. TAN

    (Department of Electrical and Computer Engineering, National University of Singapore, Engineering Drive 3, Singapore 117576, Singapore;
    Nanoscience and Nanotechnology Initiative, National University of Singapore, Engineering Drive 3, Singapore 117576, Singapore)

  • A. SENTHIL KUMAR

    (Department of Mechanical Engineering, National University of Singapore, Engineering Drive 3, Singapore 117576, Singapore)

  • M. RAHMAN

    (Department of Mechanical Engineering, National University of Singapore, Engineering Drive 3, Singapore 117576, Singapore)

Abstract

In the past decade, the development of nanoelectronics and nano-optics has attracted much interest in surface nanostructuring of semiconductor materials. The irradiation of a microlens array by a laser beam generates many focused light spots, which can act as a direct writing tool on photo-polymer materials. This maskless surface nanostructuring technique enables thousands to millions of identical nano-features to be patterned in a couple of laser pulses. Scanning electron microscopy (SEM) and atomic force microscopy (AFM) images show that nano-features were patterned uniformly on the substrate surface, which suggests a versatile way of parallel surface nanostructuring over a large area. The simulation results of the energy flux distribution at the focal plane of the microlens arrays will also be discussed.

Suggested Citation

  • C. S. Lim & M. H. Hong & Y. Lin & L. S. Tan & A. Senthil Kumar & M. Rahman, 2010. "Large Area Parallel Surface Nanostructuring With Laser Irradiation Through Microlens Arrays," Surface Review and Letters (SRL), World Scientific Publishing Co. Pte. Ltd., vol. 17(03), pages 383-387.
    • Handle: RePEc:wsi:srlxxx:v:17:y:2010:i:03:n:s0218625x10011085
    DOI: 10.1142/S0218625X10011085
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    Keywords

    Microlens arrays; nanopatterning;

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