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Raman, Dielectric And Optical Investigations Of Dlc Thin Films

Author

Listed:
  • RASOUL MALEKFAR

    (Physics Department, Tarbiat Modares University, Tehran P. O. Box 14115-175, I. R., Iran)

  • HAMID MOTAHARI

    (Physics Department, Tarbiat Modares University, Tehran P. O. Box 14115-175, I. R., Iran)

  • JALAL ROHOLLAHNEJAD

    (Physics Department, Tarbiat Modares University, Tehran P. O. Box 14115-175, I. R., Iran)

  • FATEMEH SAHRAIYAN

    (Physics Department, Islamic Azad University, North Tehran Branch, Darband, Tehran, I. R., Iran)

Abstract

Diamond-like carbon, DLC, thin films which is an amorphous hydrogenated form of carbon,a-C:H, has been synthesized by CVD method. SEM imaging, back-scattering Raman spectroscopy and reflected FT-IR spectroscopy have been used for characterization of the synthesized thin films. Kramers–Kronig dispersion relations have been used for the calculation of dielectric and optical parameters, which include the real and imaginary parts of the refractive and dielectric indices. In Raman spectroscopy, two obvious, wide and almost symmetrical peaks around 1355 cm-1(D mode) and 1520–1550 cm-1(G mode), clarify the formation ofa-C:Hthin film. Reflected spectra of thin films, in the spectral region of 400–4000 cm-1, have been recorded by the near normal FTIR reflection spectroscopy and show some peaks which can be assigned to the bending ofsp3C–C,sp3orsp2CH. The calculated data show that dielectric and optical parameters are almost independent of wavenumber.

Suggested Citation

  • Rasoul Malekfar & Hamid Motahari & Jalal Rohollahnejad & Fatemeh Sahraiyan, 2009. "Raman, Dielectric And Optical Investigations Of Dlc Thin Films," Surface Review and Letters (SRL), World Scientific Publishing Co. Pte. Ltd., vol. 16(05), pages 731-736.
    • Handle: RePEc:wsi:srlxxx:v:16:y:2009:i:05:n:s0218625x09013190
    DOI: 10.1142/S0218625X09013190
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