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COMPARISON ON THE EFFECT OFSrRuO3ANDLa0.5Sr0.5CoO3BOTTOM ELECTRODE ON DIELECTRIC PROPERTIES OFBa0.6Sr0.4TiO3THIN FILMS PREPARED BY PULSED LASER DEPOSITION

Author

Listed:
  • WENFENG QIN

    (Aviation Engineering Institute, Civil Aviation Flight University of China, Guanghan 618307, China)

  • JIE XIONG

    (State Key Laboratory of Electronic Thin Film and Integrated Devices, University of Electronics, Science and Technology of China, Chengdu 610054, China)

  • YANRONG LI

    (State Key Laboratory of Electronic Thin Film and Integrated Devices, University of Electronics, Science and Technology of China, Chengdu 610054, China)

Abstract

The dielectric properties ofBa0.6Sr0.4TiO3(BST) thin films deposited usingSrRuO3(SRO) materials as bottom electrode were compared with those of the films grown usingLa0.5Sr0.5CoO3(LSCO) materials as bottom electrode. X-ray diffraction scanning revealed that the two kinds of films could be epitaxially grown in pure single-oriented perovskite phases and atomic force microscopy showed that the root mean square roughness of BST/SRO films were similar to BST/LSCO films. The dielectric properties of the BST/SRO and BST/LSCO thin films were measured at 10 kHz and 300 K with a parallel-plate capacitor configuration. Compared with BST/LSCO, the dielectric tunability for BST/SRO films slightly decreased, while the loss decreased synchronously. The figure of merit factor value increases from 25.67 for BST/LSCO films to 48.76 for BST/SRO films under an applied voltage of 6 V. The leakage current density of the thin films at a positive voltage of 2 V decreases from2.41 × 10-7A/cm2for BST/LSCO to8.41 × 10-8A/cm2for BST/SRO. This phenomenon is ascribed to the smaller strain induced in BST/SRO materials.

Suggested Citation

  • Wenfeng Qin & Jie Xiong & Yanrong Li, 2009. "COMPARISON ON THE EFFECT OFSrRuO3ANDLa0.5Sr0.5CoO3BOTTOM ELECTRODE ON DIELECTRIC PROPERTIES OFBa0.6Sr0.4TiO3THIN FILMS PREPARED BY PULSED LASER DEPOSITION," Surface Review and Letters (SRL), World Scientific Publishing Co. Pte. Ltd., vol. 16(03), pages 493-497.
    • Handle: RePEc:wsi:srlxxx:v:16:y:2009:i:03:n:s0218625x09012901
    DOI: 10.1142/S0218625X09012901
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    Keywords

    Thin film; electrode; BST; LSCO/SRO;
    All these keywords.

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