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EFFECT OF FILTER COIL CURRENT ON PROPERTIES OFnc-TiC/a-C:HNANOCOMPOSITE FILM PREPARED BY DUAL PLASMA TECHNIQUE

Author

Listed:
  • YAOHUI WANG

    (Key Laboratory of Beam Technology and Material, Modification of Ministry of Education, Institution of Low Energy Nuclear Physics, Beijing Normal University, Beijing Radiation Center, 100875 Beijing, China)

  • XU ZHANG

    (Key Laboratory of Beam Technology and Material, Modification of Ministry of Education, Institution of Low Energy Nuclear Physics, Beijing Normal University, Beijing Radiation Center, 100875 Beijing, China)

  • XIANYING WU

    (Key Laboratory of Beam Technology and Material, Modification of Ministry of Education, Institution of Low Energy Nuclear Physics, Beijing Normal University, Beijing Radiation Center, 100875 Beijing, China)

  • HUIXING ZHANG

    (Key Laboratory of Beam Technology and Material, Modification of Ministry of Education, Institution of Low Energy Nuclear Physics, Beijing Normal University, Beijing Radiation Center, 100875 Beijing, China)

  • XIAOJI ZHANG

    (Key Laboratory of Beam Technology and Material, Modification of Ministry of Education, Institution of Low Energy Nuclear Physics, Beijing Normal University, Beijing Radiation Center, 100875 Beijing, China)

Abstract

Nanocompositenc-TiC/a-C:Hfilms, with an unusual combination of superhardness and high elastic recovery, are prepared by using dual plasma technique. The effect of the filter coil current on the compositional and structural properties of thenc-TiC/a-C:Hfilms has been investigated. It is found that the deposition rate and the composition ofnc-TiC/a-C:Hfilms could be changed by varying the filter coil current. Fortunately, by selecting the proper value of the filter coil current, 2.5 A, one can remarkably enhance the mechanical properties of the film, such as the superhardness (66.4 GPa), the high elastic modulus (510 GPa), and the high elastic recovery (83.3%).

Suggested Citation

  • Yaohui Wang & Xu Zhang & Xianying Wu & Huixing Zhang & Xiaoji Zhang, 2007. "EFFECT OF FILTER COIL CURRENT ON PROPERTIES OFnc-TiC/a-C:HNANOCOMPOSITE FILM PREPARED BY DUAL PLASMA TECHNIQUE," Surface Review and Letters (SRL), World Scientific Publishing Co. Pte. Ltd., vol. 14(06), pages 1143-1148.
    • Handle: RePEc:wsi:srlxxx:v:14:y:2007:i:06:n:s0218625x0701072x
    DOI: 10.1142/S0218625X0701072X
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