IDEAS home Printed from https://ideas.repec.org/a/wsi/srlxxx/v14y2007i06ns0218625x0701072x.html
   My bibliography  Save this article

EFFECT OF FILTER COIL CURRENT ON PROPERTIES OFnc-TiC/a-C:HNANOCOMPOSITE FILM PREPARED BY DUAL PLASMA TECHNIQUE

Author

Listed:
  • YAOHUI WANG

    (Key Laboratory of Beam Technology and Material, Modification of Ministry of Education, Institution of Low Energy Nuclear Physics, Beijing Normal University, Beijing Radiation Center, 100875 Beijing, China)

  • XU ZHANG

    (Key Laboratory of Beam Technology and Material, Modification of Ministry of Education, Institution of Low Energy Nuclear Physics, Beijing Normal University, Beijing Radiation Center, 100875 Beijing, China)

  • XIANYING WU

    (Key Laboratory of Beam Technology and Material, Modification of Ministry of Education, Institution of Low Energy Nuclear Physics, Beijing Normal University, Beijing Radiation Center, 100875 Beijing, China)

  • HUIXING ZHANG

    (Key Laboratory of Beam Technology and Material, Modification of Ministry of Education, Institution of Low Energy Nuclear Physics, Beijing Normal University, Beijing Radiation Center, 100875 Beijing, China)

  • XIAOJI ZHANG

    (Key Laboratory of Beam Technology and Material, Modification of Ministry of Education, Institution of Low Energy Nuclear Physics, Beijing Normal University, Beijing Radiation Center, 100875 Beijing, China)

Abstract

Nanocompositenc-TiC/a-C:Hfilms, with an unusual combination of superhardness and high elastic recovery, are prepared by using dual plasma technique. The effect of the filter coil current on the compositional and structural properties of thenc-TiC/a-C:Hfilms has been investigated. It is found that the deposition rate and the composition ofnc-TiC/a-C:Hfilms could be changed by varying the filter coil current. Fortunately, by selecting the proper value of the filter coil current, 2.5 A, one can remarkably enhance the mechanical properties of the film, such as the superhardness (66.4 GPa), the high elastic modulus (510 GPa), and the high elastic recovery (83.3%).

Suggested Citation

  • Yaohui Wang & Xu Zhang & Xianying Wu & Huixing Zhang & Xiaoji Zhang, 2007. "EFFECT OF FILTER COIL CURRENT ON PROPERTIES OFnc-TiC/a-C:HNANOCOMPOSITE FILM PREPARED BY DUAL PLASMA TECHNIQUE," Surface Review and Letters (SRL), World Scientific Publishing Co. Pte. Ltd., vol. 14(06), pages 1143-1148.
    • Handle: RePEc:wsi:srlxxx:v:14:y:2007:i:06:n:s0218625x0701072x
    DOI: 10.1142/S0218625X0701072X
    as

    Download full text from publisher

    File URL: http://www.worldscientific.com/doi/abs/10.1142/S0218625X0701072X
    Download Restriction: Access to full text is restricted to subscribers
    File URL: https://libkey.io/10.1142/S0218625X0701072X?utm_source=ideas
    LibKey link: if access is restricted and if your library uses this service, LibKey will redirect you to where you can use your library subscription to access this item
    ---><---

    As the access to this document is restricted, you may want to search for a different version of it.

    Corrections

    All material on this site has been provided by the respective publishers and authors. You can help correct errors and omissions. When requesting a correction, please mention this item's handle: RePEc:wsi:srlxxx:v:14:y:2007:i:06:n:s0218625x0701072x. See general information about how to correct material in RePEc.

    If you have authored this item and are not yet registered with RePEc, we encourage you to do it here. This allows to link your profile to this item. It also allows you to accept potential citations to this item that we are uncertain about.

    We have no bibliographic references for this item. You can help adding them by using this form .

    If you know of missing items citing this one, you can help us creating those links by adding the relevant references in the same way as above, for each refering item. If you are a registered author of this item, you may also want to check the "citations" tab in your RePEc Author Service profile, as there may be some citations waiting for confirmation.

    For technical questions regarding this item, or to correct its authors, title, abstract, bibliographic or download information, contact: Tai Tone Lim (email available below). General contact details of provider: http://www.worldscinet.com/srl/srl.shtml .

    Please note that corrections may take a couple of weeks to filter through the various RePEc services.

    IDEAS is a RePEc service. RePEc uses bibliographic data supplied by the respective publishers.