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STUDIES ON THE HETEROJUNCTION STRUCTURE OFn-Si/p-NANOCRYSTALLINE DIAMOND FILM

Author

Listed:
  • LINJUN WANG

    (School of Materials Science and Engineering, Shanghai University, Shanghai 200072, P. R. China)

  • JIANMIN LIU

    (School of Materials Science and Engineering, Shanghai University, Shanghai 200072, P. R. China)

  • LING REN

    (School of Materials Science and Engineering, Shanghai University, Shanghai 200072, P. R. China)

  • QINGFENG SU

    (School of Materials Science and Engineering, Shanghai University, Shanghai 200072, P. R. China)

  • RUN XU

    (School of Materials Science and Engineering, Shanghai University, Shanghai 200072, P. R. China)

  • WEIMIN SHI

    (School of Materials Science and Engineering, Shanghai University, Shanghai 200072, P. R. China)

  • YIBEN XIA

    (School of Materials Science and Engineering, Shanghai University, Shanghai 200072, P. R. China)

Abstract

An undoped p-type nanocrystalline diamond (NCD) film was grown by an electron assisted hot filament chemical vapor deposition (EA-HFCVD) technology on an n-type single-crystallineSisubstrate to fabricate p-NCD/n-Siheterojunction. The structure and morphology of the NCD film, which was analyzed by Raman spectroscopy, X-ray diffraction (XRD), and scanning electron microscopy (SEM), showed that the film consisted of 40–60 nm polycrystalline nano-grains. The results showed that with EA-HFCVD method, not only an undoped NCD film with high conductivity but also a p–n heterojunction diode between the NCD film and n-Sisubstrate was fabricated successfully. The p-NCD/n-Siheterostructure was also used for ultraviolet (UV) photodetector application. Operating at a bias voltage of 10 V, this photodetector showed a significant discrimination between UV and visible light, and the UV/visible-blind ratio was about three orders of magnitude.

Suggested Citation

  • Linjun Wang & Jianmin Liu & Ling Ren & Qingfeng Su & Run Xu & Weimin Shi & Yiben Xia, 2007. "STUDIES ON THE HETEROJUNCTION STRUCTURE OFn-Si/p-NANOCRYSTALLINE DIAMOND FILM," Surface Review and Letters (SRL), World Scientific Publishing Co. Pte. Ltd., vol. 14(04), pages 761-764.
    • Handle: RePEc:wsi:srlxxx:v:14:y:2007:i:04:n:s0218625x07010214
    DOI: 10.1142/S0218625X07010214
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