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Fabrication Of True-Color Micropatterns By 2d Stepwise Contraction And Adsorption Nanolithography (Scan)

Author

Listed:
  • HAI LI

    (Shanghai Institute of Applied Physics, Chinese Academy of Sciences, P.O. Box 800-204, Shanghai 201800, P. R. China;
    Graduate School of the Chinese Academy of Sciences, Beijing 100080, P. R. China)

  • XIAO-DONG ZHANG

    (Bio-X DNA Computer Consortium, Bio-X Life Science Research Center, College of Life Science and Biotechnology, Shanghai JiaoTong University, 800 Dongchuan Road, Shanghai 200240, P. R. China)

  • YI ZHANG

    (Shanghai Institute of Applied Physics, Chinese Academy of Sciences, P.O. Box 800-204, Shanghai 201800, P. R. China)

  • ZHEN-QIAN OUYANG

    (Bio-X DNA Computer Consortium, Bio-X Life Science Research Center, College of Life Science and Biotechnology, Shanghai JiaoTong University, 800 Dongchuan Road, Shanghai 200240, P. R. China)

  • JUN HU

    (Shanghai Institute of Applied Physics, Chinese Academy of Sciences, P.O. Box 800-204, Shanghai 201800, P. R. China;
    Bio-X DNA Computer Consortium, Bio-X Life Science Research Center, College of Life Science and Biotechnology, Shanghai JiaoTong University, 800 Dongchuan Road, Shanghai 200240, P. R. China)

Abstract

Fabrication of structures on the micro- and nanometer scales is of great importance for both fundamental research and potential applications. While microlithography methods are relatively established, the production of multi-component micro- and nanostructures with high density still presents difficulties. In this paper, a novel strategy termed as two-dimensional (2D) stepwise contraction and adsorption nanolithography (SCAN) is used to fabricate true-color micropatterns through a series of size-reduction process based on the physical elasticity of elastomer. Faithful multicolor patterns with feature size about 30 times smaller than the initial ones can be fabricated by employing the 2D SCAN. The simplicity and high throughput capability of SCAN make it a competitive alternative to other micro- and nanolithography techniques.

Suggested Citation

  • Hai Li & Xiao-Dong Zhang & Yi Zhang & Zhen-Qian Ouyang & Jun Hu, 2007. "Fabrication Of True-Color Micropatterns By 2d Stepwise Contraction And Adsorption Nanolithography (Scan)," Surface Review and Letters (SRL), World Scientific Publishing Co. Pte. Ltd., vol. 14(01), pages 129-134.
    • Handle: RePEc:wsi:srlxxx:v:14:y:2007:i:01:n:s0218625x07009141
    DOI: 10.1142/S0218625X07009141
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