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Theoretical Analyses For Laser Machining Microchannels And Demonstration Of Their Uses In Manufacture Of A Microfluidic Optical Switch

Author

Listed:
  • DANIEL LIM

    (Singapore Institute of Manufacturing Technology, 71 Nanyang Drive, Singapore 638075, Singapore)

  • ERNA GONDO SANTOSO

    (Nanyang Technological University, Nanyang Avenue, Singapore, 639798, Singapore)

  • KIM MING TEH

    (Singapore Institute of Manufacturing Technology, 71 Nanyang Drive, Singapore 638075, Singapore)

  • STEPHEN WAN

    (Singapore Institute of Manufacturing Technology, 71 Nanyang Drive, Singapore 638075, Singapore)

  • H. Y. ZHENG

    (Singapore Institute of Manufacturing Technology, 71 Nanyang Drive, Singapore 638075, Singapore)

Abstract

Silicon has been widely used to fabricate microfluidic devices due to the dominance of silicon microfabrication technologies available. In this paper, theoretical analyses are carried out to suggest suitable laser machining parameters to achieve required channel geometries. Based on the analyses, a low-powerCO2laser was employed to create microchannels in Acrylic substrate for the use of manufacturing an optical bubble switch. The developed equations are found useful for selecting appropriate machining parameters. The ability to use a low-costCO2laser to fabricate microchannels provides an alternative and cost-effective method for prototyping fluid flow channels, chambers and cavities in microfluidic lab chips.

Suggested Citation

  • Daniel Lim & Erna Gondo Santoso & Kim Ming Teh & Stephen Wan & H. Y. Zheng, 2006. "Theoretical Analyses For Laser Machining Microchannels And Demonstration Of Their Uses In Manufacture Of A Microfluidic Optical Switch," Surface Review and Letters (SRL), World Scientific Publishing Co. Pte. Ltd., vol. 13(06), pages 795-802.
    • Handle: RePEc:wsi:srlxxx:v:13:y:2006:i:06:n:s0218625x06008876
    DOI: 10.1142/S0218625X06008876
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