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Raman Scattering Studies On The Structural Properties Of Pulsed Laser Deposited Amorphous Carbon Nitride Thin Films

Author

Listed:
  • M. RUSOP

    (Department of Environmental Technology and Urban Planning, Nagoya Institute of Technology, Showa-ku, Nagoya 466-8555, Japan)

  • T. SOGA

    (Department of Environmental Technology and Urban Planning, Nagoya Institute of Technology, Showa-ku, Nagoya 466-8555, Japan)

  • T. JIMBO

    (Department of Environmental Technology and Urban Planning, Nagoya Institute of Technology, Showa-ku, Nagoya 466-8555, Japan)

Abstract

Raman scattering analysis revealed that the structure of carbon(C)films prepared by pulsed laser deposition at room temperature is predominantly amorphous and the structure of amorphousCnitride(a-CNx)films can be changed with varying substrate temperatures (ST) from 20 to 500°C. The depositeda-CNxfilms are composed ofC–N,C≡NandC–Obonded materials and theC–NandC≡Nbonds are increased with ST. We have found no other obvious peaks that can be distinguished in the range of 900 to 2300 cm-1in which several peaks always appear ina-CNxfilms. The spectra were deconvoluted into Raman D and G peaks and the structural parameters were determined. The upward shifts of Raman G peak towards 1592 cm-1show evidence of a progressive formation of crystallites ina-CNxfilms upon increase of ST, while the upward shifts of Raman D peak towards 1397 cm-1have been related to the decrease of bond-angle disorder andsp3tetrahedral bonding in its structure. Raman FWHM andID/IGalso indicate thatNincorporation with increase of ST caused an increase in the number and/or size of graphitic domains in thea-CNxfilms.

Suggested Citation

  • M. Rusop & T. Soga & T. Jimbo, 2005. "Raman Scattering Studies On The Structural Properties Of Pulsed Laser Deposited Amorphous Carbon Nitride Thin Films," Surface Review and Letters (SRL), World Scientific Publishing Co. Pte. Ltd., vol. 12(02), pages 173-184.
    • Handle: RePEc:wsi:srlxxx:v:12:y:2005:i:02:n:s0218625x05006913
    DOI: 10.1142/S0218625X05006913
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