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The Optical Characteristics Of Nitrogen-Doped Amorphous Carbon Thin-Films Grown On Novel Heat-Tolerant Flexible Plastic Substrates By A Newly Developed Microwave Surface Wave Plasma Chemical Vapor Deposition Method

Author

Listed:
  • M. RUSOP

    (Department of Environmental Technology and Urban Planning, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya 466-8555, Japan)

  • A. M. M. OMER

    (Department of Electrical Engineering, Graduate School of Engineering, Chubu University, 1200 Matsumoto-cho, Kasugai 487-8501, Japan)

  • S. ADHIKARI

    (Department of Electrical Engineering, Graduate School of Engineering, Chubu University, 1200 Matsumoto-cho, Kasugai 487-8501, Japan)

  • S. ADHIKARY

    (Department of Electrical Engineering, Graduate School of Engineering, Chubu University, 1200 Matsumoto-cho, Kasugai 487-8501, Japan)

  • H. UCHIDA

    (Department of Electronic Engineering, Faculty of Engineering, Chubu University, 1200 Matsumoto-cho, Kasugai 487-8501, Japan)

  • T. SOGA

    (Department of Environmental Technology and Urban Planning, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya 466-8555, Japan)

  • T. JIMBO

    (Department of Environmental Technology and Urban Planning, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya 466-8555, Japan)

  • M. UMENO

    (Department of Electronic Engineering, Faculty of Engineering, Chubu University, 1200 Matsumoto-cho, Kasugai 487-8501, Japan)

Abstract

Nitrogen-doped amorphous carbon(a-C:N)thin-films have been deposited on novel heat tolerant flexible plastic substrates by a newly developed microwave surface wave plasma chemical vapor deposition (MWSWP-CVD) method. Methane gas and also camphor dissolved with ethyl alcohol gas composition have been used as plasma source. Nitrogen gas has been used as a dopant material fora-C:Nfilms. In this paper, the optical characteristics of absorption coefficients and band gaps fora-C:Nare discussed. The optical band gap ofa-C:Nfilms was found to be approximately 1.7 eV, which is close to the suitable band gap for solar cell. The optical band gap ofa-C:Nwas found to be dependent on the composition gas source pressures.

Suggested Citation

  • M. Rusop & A. M. M. Omer & S. Adhikari & S. Adhikary & H. Uchida & T. Soga & T. Jimbo & M. Umeno, 2004. "The Optical Characteristics Of Nitrogen-Doped Amorphous Carbon Thin-Films Grown On Novel Heat-Tolerant Flexible Plastic Substrates By A Newly Developed Microwave Surface Wave Plasma Chemical Vapor Dep," Surface Review and Letters (SRL), World Scientific Publishing Co. Pte. Ltd., vol. 11(06), pages 585-589.
    • Handle: RePEc:wsi:srlxxx:v:11:y:2004:i:06:n:s0218625x0400658x
    DOI: 10.1142/S0218625X0400658X
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