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PEEM AND SXES CHARACTERIZATION ON THE SURFACE AND INTERFACE OF THE TRANSITION-METAL/SiC SYSTEM

Author

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  • JOSELITO LABIS

    (Graduate School of Natural Science and Technology, Okayama University, 3-1-1 Tsushima Naka, Okayama 700-8530, Japan)

  • AKIHIKO OHI

    (Graduate School of Natural Science and Technology, Okayama University, 3-1-1 Tsushima Naka, Okayama 700-8530, Japan)

  • CHIHIRO KAMEZAWA

    (Graduate School of Natural Science and Technology, Okayama University, 3-1-1 Tsushima Naka, Okayama 700-8530, Japan)

  • TOSHINORI FUJIKI

    (Graduate School of Natural Science and Technology, Okayama University, 3-1-1 Tsushima Naka, Okayama 700-8530, Japan)

  • KENICHI YOSHIDA

    (Graduate School of Natural Science and Technology, Okayama University, 3-1-1 Tsushima Naka, Okayama 700-8530, Japan)

  • MASAAKI HIRAI

    (Research Laboratory for Surface Science, Faculty of Science, Okayama University, 3-1-1 Tsushima Naka, Okayama 700-8530, Japan)

  • MASAHIKO KUSAKA

    (Research Laboratory for Surface Science, Faculty of Science, Okayama University, 3-1-1 Tsushima Naka, Okayama 700-8530, Japan)

  • MOTOHIRO IWAMI

    (Research Laboratory for Surface Science, Faculty of Science, Okayama University, 3-1-1 Tsushima Naka, Okayama 700-8530, Japan)

Abstract

The SiL2,3and CKsoft X-ray emission spectra of the interface of the Ti(50 nm)/4H-SiC(substrate) system, thermally annealed from 800°C to 1000°C and characterized by soft X-ray emission spectroscopy (SXES), revealed the formation of a reacted region composed of silicides withTi5Si3as the majority formed species and carbides in TiC-like bonding. Also, the photoemission electron microscopy (PEEM) imaging of Ti(10 nm) film on 3C-SiC surface duringin situheat treatment showed the formation of island structures (in ring clusters) at ~ 800°C.

Suggested Citation

  • Joselito Labis & Akihiko Ohi & Chihiro Kamezawa & Toshinori Fujiki & Kenichi Yoshida & Masaaki Hirai & Masahiko Kusaka & Motohiro Iwami, 2002. "PEEM AND SXES CHARACTERIZATION ON THE SURFACE AND INTERFACE OF THE TRANSITION-METAL/SiC SYSTEM," Surface Review and Letters (SRL), World Scientific Publishing Co. Pte. Ltd., vol. 9(01), pages 313-318.
    • Handle: RePEc:wsi:srlxxx:v:09:y:2002:i:01:n:s0218625x02002300
    DOI: 10.1142/S0218625X02002300
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