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IN SITUHALL MEASUREMENTS OF MACROSCOPIC ELECTRICAL PROPERTIES OF CHROMIUM-COVEREDSi(111)SURFACES

Author

Listed:
  • N. G. GALKIN

    (Institute for Automation and Control Processes, Far Eastern Division of the Russian Academy of Sciences, 690041, Vladivostok, Russian Federation, Russia;
    Far Eastern State Technical University, 690069, Vladivostok, Russian Federation, Russia)

  • D. L. GOROSHKO

    (Institute for Automation and Control Processes, Far Eastern Division of the Russian Academy of Sciences, 690041, Vladivostok, Russian Federation, Russia)

  • A. V. KONCHENKO

    (Institute for Automation and Control Processes, Far Eastern Division of the Russian Academy of Sciences, 690041, Vladivostok, Russian Federation, Russia)

  • V. A. IVANOV

    (Institute for Automation and Control Processes, Far Eastern Division of the Russian Academy of Sciences, 690041, Vladivostok, Russian Federation, Russia;
    Far Eastern State University, 690000, Vladivostok, Russian Federation, Russia)

  • A. S. GOURALNIK

    (Institute for Automation and Control Processes, Far Eastern Division of the Russian Academy of Sciences, 690041, Vladivostok, Russian Federation, Russia)

Abstract

The firstin situHall measurements of the ordered chromium surface phases on Si(111) substrate and CrSi(111) epitaxial films after their formation are presented. Formation ofSi(111)-(1× 1)-Cr(0.1 nm Cr) and Si(111)-[(${\sqrt 3}\times {\sqrt 3}$)/30°]-Cr (0.3 nm Cr) surface phases results in an increase in the sheet resistivity of Si(111)-Cr surface phase samples. The conductivities along the surface phases at these chromium thicknesses are very low. The conductivity decrease is caused by a decrease in the electron mobility in the surface phase layers. Formation of an epitaxial CrSi(111) layer with averaged Hall parameters (hole mobility of440cm2·V-1·s-1, sheet resistivity of2.2·104Ω-1and sheet hole concentration of0.65·1012cm-2) has been observed at 1.5–1.8 nm of chromium thickness.

Suggested Citation

  • N. G. Galkin & D. L. Goroshko & A. V. Konchenko & V. A. Ivanov & A. S. Gouralnik, 1999. "IN SITUHALL MEASUREMENTS OF MACROSCOPIC ELECTRICAL PROPERTIES OF CHROMIUM-COVEREDSi(111)SURFACES," Surface Review and Letters (SRL), World Scientific Publishing Co. Pte. Ltd., vol. 6(01), pages 7-12.
  • Handle: RePEc:wsi:srlxxx:v:06:y:1999:i:01:n:s0218625x99000032
    DOI: 10.1142/S0218625X99000032
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