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SMART: An Aberration-Corrected XPEEM/LEEM with Energy Filter

Author

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  • R. Wichtendahl

    (Fritz-Haber-Insitut der Max-Planck-Gesellschaft, Faradayweg 4-6, D-14195 Berlin, Germany)

  • R. Fink

    (Universität Würzburg, Experimentelle Physik II, Am Hubland, D-97074 Würzburg, Germany)

  • H. Kuhlenbeck

    (Fritz-Haber-Insitut der Max-Planck-Gesellschaft, Faradayweg 4-6, D-14195 Berlin, Germany)

  • D. Preikszas

    (Technische Hochschule Darmstadt, Angewandte Physik, Hochschulstr. 6, D-64289 Darmstadt, Germany)

  • H. Rose

    (Technische Hochschule Darmstadt, Angewandte Physik, Hochschulstr. 6, D-64289 Darmstadt, Germany)

  • R. Spehr

    (Technische Hochschule Darmstadt, Angewandte Physik, Hochschulstr. 6, D-64289 Darmstadt, Germany)

  • P. Hartel

    (Technische Hochschule Darmstadt, Angewandte Physik, Hochschulstr. 6, D-64289 Darmstadt, Germany)

  • W. Engel

    (Fritz-Haber-Insitut der Max-Planck-Gesellschaft, Faradayweg 4-6, D-14195 Berlin, Germany)

  • R. Schlögl

    (Fritz-Haber-Insitut der Max-Planck-Gesellschaft, Faradayweg 4-6, D-14195 Berlin, Germany)

  • H.-J. Freund

    (Fritz-Haber-Insitut der Max-Planck-Gesellschaft, Faradayweg 4-6, D-14195 Berlin, Germany)

  • A. M. Bradshaw

    (Fritz-Haber-Insitut der Max-Planck-Gesellschaft, Faradayweg 4-6, D-14195 Berlin, Germany)

  • G. Lilienkamp

    (Arizona State University, Department of Physics and Astronomy, Tempe, AZ85287-1504, USA)

  • Th. Schmidt

    (Arizona State University, Department of Physics and Astronomy, Tempe, AZ85287-1504, USA)

  • E. Bauer

    (Technische Universität Clausthal, Leibnizstr. 4, D-38678 Clausthal-Zellerfeld, Germany;
    Arizona State University, Department of Physics and Astronomy, Tempe, AZ85287-1504, USA)

  • G. Benner

    (LEO Elektronenmikroskopie GmbH, D-73446 Oberkochen, Germany)

  • E. Umbach

    (Universität Würzburg, Experimentelle Physik II, Am Hubland, D-97074 Würzburg, Germany)

Abstract

A new UHV spectroscopic X-ray photoelectron emission and low energy electron microscope is presently under construction for the installation at the PM-6 soft X-ray undulator beamline at BESSY II. Using a combination of a sophisticated magnetic beam splitter and an electrostatic tetrode mirror, the spherical and chromatic aberrations of the objective lens are corrected and thus the lateral resolution and sensitivity of the instrument improved. In addition a corrected imaging energy filter (a so-called omega filter) allows high spectral resolution(ΔE=0.1eV)in the photoemission modes and back-ground suppression in LEEM and small-spot LEED modes. The theoretical prediction for the lateral resolution is 5 Å; a realistic goal is about 2 nm. Thus, a variety of electron spectroscopies (XAS, XPS, UPS, XAES) and electron diffraction (LEED, LEEM) or reflection techniques (MEM) will be available with spatial resolution unreached so far.

Suggested Citation

  • R. Wichtendahl & R. Fink & H. Kuhlenbeck & D. Preikszas & H. Rose & R. Spehr & P. Hartel & W. Engel & R. Schlögl & H.-J. Freund & A. M. Bradshaw & G. Lilienkamp & Th. Schmidt & E. Bauer & G. Benner & , 1998. "SMART: An Aberration-Corrected XPEEM/LEEM with Energy Filter," Surface Review and Letters (SRL), World Scientific Publishing Co. Pte. Ltd., vol. 5(06), pages 1249-1256.
    • Handle: RePEc:wsi:srlxxx:v:05:y:1998:i:06:n:s0218625x98001584
    DOI: 10.1142/S0218625X98001584
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