IDEAS home Printed from https://ideas.repec.org/a/wsi/srlxxx/v05y1998i03n04ns0218625x98001262.html
   My bibliography  Save this article

Beyond Intensity Oscillations

Author

Listed:
  • T.-M. Lu

    (Department of Physics, Applied Physics, and Astronomy, Rensselaer Polytechnic Institute, Troy, NY 12180-3590, USA;
    Center for Integrated Electronics and Electronics Manufacturing, Rensselaer Polytechnic Institute, Troy, NY 12180-3590, USA)

  • G.-C. Wang

    (Department of Physics, Applied Physics, and Astronomy, Rensselaer Polytechnic Institute, Troy, NY 12180-3590, USA;
    Center for Integrated Electronics and Electronics Manufacturing, Rensselaer Polytechnic Institute, Troy, NY 12180-3590, USA)

  • Y.-P. Zhao

    (Department of Physics, Applied Physics, and Astronomy, Rensselaer Polytechnic Institute, Troy, NY 12180-3590, USA;
    Center for Integrated Electronics and Electronics Manufacturing, Rensselaer Polytechnic Institute, Troy, NY 12180-3590, USA)

Abstract

The decay in the oscillatory amplitude of diffraction intensity from an epitaxial growth front is due to the buildup of a multilevel step structure. This can occur as a result of kinetic limitations when the substrate temperature is sufficiently low or the deposition rate is very high so that thermal equilibrium cannot be ochieved during growth. Another mechanism that can lead to a multilevel growth front is the existence of a step edge barrier at the steps so that deposited atoms cannot diffuse "downward" at the step edge which leads to a mound like structure. In this paper we describe the characteristics of the diffraction intensity angular profile from the initial layer-by-layer structure to the final multilevel structure. A particular emphasis will be placed on the characteristics of the reciprocal space structure when the amplitude of the intensity oscillation decays to zero.

Suggested Citation

  • T.-M. Lu & G.-C. Wang & Y.-P. Zhao, 1998. "Beyond Intensity Oscillations," Surface Review and Letters (SRL), World Scientific Publishing Co. Pte. Ltd., vol. 5(03n04), pages 899-912.
    • Handle: RePEc:wsi:srlxxx:v:05:y:1998:i:03n04:n:s0218625x98001262
    DOI: 10.1142/S0218625X98001262
    as

    Download full text from publisher

    File URL: http://www.worldscientific.com/doi/abs/10.1142/S0218625X98001262
    Download Restriction: Access to full text is restricted to subscribers
    File URL: https://libkey.io/10.1142/S0218625X98001262?utm_source=ideas
    LibKey link: if access is restricted and if your library uses this service, LibKey will redirect you to where you can use your library subscription to access this item
    ---><---

    As the access to this document is restricted, you may want to search for a different version of it.

    More about this item

    Statistics

    Access and download statistics

    Corrections

    All material on this site has been provided by the respective publishers and authors. You can help correct errors and omissions. When requesting a correction, please mention this item's handle: RePEc:wsi:srlxxx:v:05:y:1998:i:03n04:n:s0218625x98001262. See general information about how to correct material in RePEc.

    If you have authored this item and are not yet registered with RePEc, we encourage you to do it here. This allows to link your profile to this item. It also allows you to accept potential citations to this item that we are uncertain about.

    We have no bibliographic references for this item. You can help adding them by using this form .

    If you know of missing items citing this one, you can help us creating those links by adding the relevant references in the same way as above, for each refering item. If you are a registered author of this item, you may also want to check the "citations" tab in your RePEc Author Service profile, as there may be some citations waiting for confirmation.

    For technical questions regarding this item, or to correct its authors, title, abstract, bibliographic or download information, contact: Tai Tone Lim (email available below). General contact details of provider: http://www.worldscinet.com/srl/srl.shtml .

    Please note that corrections may take a couple of weeks to filter through the various RePEc services.

    IDEAS is a RePEc service. RePEc uses bibliographic data supplied by the respective publishers.