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Formation and Chemical Selectivity of Partially Ga-Terminated Si(111) Surfaces

Author

Listed:
  • Masakazu Ichikawa

    (Joint Research Center for Atom Technology, 1-1-4 Higashi, Tsukuba, Ibaraki 305, Japan)

  • Ken Fujita

    (Joint Research Center for Atom Technology, 1-1-4 Higashi, Tsukuba, Ibaraki 305, Japan)

  • Yukihiro Kusumi

    (Joint Research Center for Atom Technology, 1-1-4 Higashi, Tsukuba, Ibaraki 305, Japan)

Abstract

Nanoscale stripes of the Si(111)-(7 × 7) structure with atomic accuracy can be formed on the$(\sqrt{3}\times\sqrt{3})\mbox{-}{\rm Ga}$-terminated Si(111) surface, by selective thermal desorption of Ga atoms from step edges, when the surface is tilted toward the$[\bar{1}\bar{1}2]$direction. The nanoscale stripes of the 7 × 7 structure can also be formed in expected areas by selective thermal desorption of Ga atoms induced by STM stimulation. A Ga-terminated area is found to be chemically less active for adsorption of oxygen, disilane and antimony molecules which selectively react in the 7 × 7 area. By using the chemical selectivity and the nanoscale 7 × 7 stripe for formation method, a stripe pattern with the antimony-adsorbed 7 × 7 areas and$(\sqrt{3}\times\sqrt{3})\mbox{-}{\rm Ga}$areas is produced as a demonstration of nanostructure formation.

Suggested Citation

  • Masakazu Ichikawa & Ken Fujita & Yukihiro Kusumi, 1998. "Formation and Chemical Selectivity of Partially Ga-Terminated Si(111) Surfaces," Surface Review and Letters (SRL), World Scientific Publishing Co. Pte. Ltd., vol. 5(03n04), pages 665-673.
  • Handle: RePEc:wsi:srlxxx:v:05:y:1998:i:03n04:n:s0218625x9800102x
    DOI: 10.1142/S0218625X9800102X
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