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X-Ray Characterization of Buried δ Layers

Author

Listed:
  • J. Falta

    (Hamburger Synchrotronstrahlungslabor HASYLAB am Deutschen, Elektronen-Synchrotron (DESY), Notkestrasse 85, D-22607 Hamburg, Germany)

  • D. Bahr

    (Hamburger Synchrotronstrahlungslabor HASYLAB am Deutschen, Elektronen-Synchrotron (DESY), Notkestrasse 85, D-22607 Hamburg, Germany)

  • G. Materlik

    (Hamburger Synchrotronstrahlungslabor HASYLAB am Deutschen, Elektronen-Synchrotron (DESY), Notkestrasse 85, D-22607 Hamburg, Germany)

  • B. H. Müller

    (Institut für Festkörperphysik, Universität Hannover, Appelstr. 2, 30167 Hannover, Germany)

  • M. Horn-Von Hoegen

    (Institut für Festkörperphysik, Universität Hannover, Appelstr. 2, 30167 Hannover, Germany)

Abstract

A combination of measurements of crystal truncation roda and X-ray standing waves has been used for a detailed characterization of buried Ge δ layers on Si(001). Measurements of crystal truncation rods reveal the interface roughness, the δ layer lattice constant and the δ layer concentration. From measurements with X-ray standing waves the dopant lattice position and crystallinity of the δ layer are determined. We find a linear dependence of the local tetragonal distortion of the Ge bonding in the δ layer on the Ge concentration in the layer.

Suggested Citation

  • J. Falta & D. Bahr & G. Materlik & B. H. Müller & M. Horn-Von Hoegen, 1998. "X-Ray Characterization of Buried δ Layers," Surface Review and Letters (SRL), World Scientific Publishing Co. Pte. Ltd., vol. 5(01), pages 145-149.
    • Handle: RePEc:wsi:srlxxx:v:05:y:1998:i:01:n:s0218625x98000281
    DOI: 10.1142/S0218625X98000281
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