IDEAS home Printed from https://ideas.repec.org/a/wsi/srlxxx/v05y1998i01ns0218625x98000098.html
   My bibliography  Save this article

Structured Roughness of Si Surface Obtained by Molecular Beam Epitaxy on Highly Misoriented Si(111) Substrate

Author

Listed:
  • J.-M. Gay

    (CRMC2-CNRS, (Laboratory associated with the Universités d'Aix-Marseille II and III.) Campus de Luminy, Case 913, 13288 Marseille Cedex 9, France)

  • L. Lapéna

    (CRMC2-CNRS, (Laboratory associated with the Universités d'Aix-Marseille II and III.) Campus de Luminy, Case 913, 13288 Marseille Cedex 9, France)

  • M. Ladevèze

    (CRMC2-CNRS, (Laboratory associated with the Universités d'Aix-Marseille II and III.) Campus de Luminy, Case 913, 13288 Marseille Cedex 9, France)

  • M. Tolan

    (Institut für Experimentalphysik, Christian-Albrechts-Universität, Olshausentrasse 40-60, 24098 Kiel, Germany)

Abstract

We present the results of an X-ray analysis of the surface morphology of a sample obtained by Si MBE onto a higly misoriented Si(111) substrate. X-ray reflectivity and diffuse scattering provide a description of the surface. The amplitude of the surface profile is about 6.6 nm, with a sawtooth shape. Satellites in the diffuse scattering indicate a 215±5 nm periodicity int he miscut direction. The analysis of satellite intensities shows an asymmetry of the surface shape. The results are in agreement with AFM images of the surface.

Suggested Citation

  • J.-M. Gay & L. Lapéna & M. Ladevèze & M. Tolan, 1998. "Structured Roughness of Si Surface Obtained by Molecular Beam Epitaxy on Highly Misoriented Si(111) Substrate," Surface Review and Letters (SRL), World Scientific Publishing Co. Pte. Ltd., vol. 5(01), pages 31-36.
    • Handle: RePEc:wsi:srlxxx:v:05:y:1998:i:01:n:s0218625x98000098
    DOI: 10.1142/S0218625X98000098
    as

    Download full text from publisher

    File URL: http://www.worldscientific.com/doi/abs/10.1142/S0218625X98000098
    Download Restriction: Access to full text is restricted to subscribers
    File URL: https://libkey.io/10.1142/S0218625X98000098?utm_source=ideas
    LibKey link: if access is restricted and if your library uses this service, LibKey will redirect you to where you can use your library subscription to access this item
    ---><---

    As the access to this document is restricted, you may want to search for a different version of it.

    More about this item

    Statistics

    Access and download statistics

    Corrections

    All material on this site has been provided by the respective publishers and authors. You can help correct errors and omissions. When requesting a correction, please mention this item's handle: RePEc:wsi:srlxxx:v:05:y:1998:i:01:n:s0218625x98000098. See general information about how to correct material in RePEc.

    If you have authored this item and are not yet registered with RePEc, we encourage you to do it here. This allows to link your profile to this item. It also allows you to accept potential citations to this item that we are uncertain about.

    We have no bibliographic references for this item. You can help adding them by using this form .

    If you know of missing items citing this one, you can help us creating those links by adding the relevant references in the same way as above, for each refering item. If you are a registered author of this item, you may also want to check the "citations" tab in your RePEc Author Service profile, as there may be some citations waiting for confirmation.

    For technical questions regarding this item, or to correct its authors, title, abstract, bibliographic or download information, contact: Tai Tone Lim (email available below). General contact details of provider: http://www.worldscinet.com/srl/srl.shtml .

    Please note that corrections may take a couple of weeks to filter through the various RePEc services.

    IDEAS is a RePEc service. RePEc uses bibliographic data supplied by the respective publishers.