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REM STUDY OF THESi(111)VICINAL SURFACES

Author

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  • T. SUZUKI

    (Physics Department, Tokyo Institute of Technology, Oh-okayama, Meguro, Tokyo 152, Japan)

  • K. YAGI

    (Physics Department, Tokyo Institute of Technology, Oh-okayama, Meguro, Tokyo 152, Japan)

Abstract

In this paper, reflection electron microscope (REM) studies of surfaces are briefly reviewed and recent REM studies ofSi(111)vicinal surfaces are described. Triple-layer-height steps are formed on the vicinal surfaces inclined by angles of about 1.5–5° toward the$[\bar{1}\bar{1}2]$direction. The triple steps are seen below the phase transition temperature between the7× 7and1× 1structures and break into single steps above the phase transition temperature. Vicinal surfaces inclined toward the$[11\bar{2}]$direction showed a so-called hill-and-valley structure that is composed of the (111) and an unindexed surface terraces below the phase transition temperature. The hill-and-valley structure disappeared above the phase transition temperature.

Suggested Citation

  • T. Suzuki & K. Yagi, 1997. "REM STUDY OF THESi(111)VICINAL SURFACES," Surface Review and Letters (SRL), World Scientific Publishing Co. Pte. Ltd., vol. 4(03), pages 543-549.
    • Handle: RePEc:wsi:srlxxx:v:04:y:1997:i:03:n:s0218625x97000523
    DOI: 10.1142/S0218625X97000523
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