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PRODUCTION OF SIZE-CONTROLLEDSiFINE PARTICLES USING PULSED RF DISCHARGE

Author

Listed:
  • M. SHIRATANI

    (Department of Electrical Engineering, Faculty of Engineering, Kyushu University, Hakozaki, Fukuoka 812, Japan)

  • H. KAWASAKI

    (Department of Electrical Engineering, Faculty of Engineering, Kyushu University, Hakozaki, Fukuoka 812, Japan)

  • T. FUKUZAWA

    (Department of Electrical Engineering, Faculty of Engineering, Kyushu University, Hakozaki, Fukuoka 812, Japan)

  • Y. WATANABE

    (Department of Electrical Engineering, Faculty of Engineering, Kyushu University, Hakozaki, Fukuoka 812, Japan)

Abstract

We describe a new method for production of size-controlledSifine particles that employs a pulsed RF silane discharge. Size, density, and morphology of particles prepared by this method are studied using scanning electron microscopy. Particles with a small size dispersion are produced in the size range from 10 to 120 nm and with densities above107cm−3. It is found that particles grow through three phases of nucleation, rapid growth, and growth saturation. Particles in two different size ranges coexist after the initiation of the rapid-growth phase above RF power of40W, and coagulation of particles plays a crucial role in the rapid-growth phase.

Suggested Citation

  • M. Shiratani & H. Kawasaki & T. Fukuzawa & Y. Watanabe, 1996. "PRODUCTION OF SIZE-CONTROLLEDSiFINE PARTICLES USING PULSED RF DISCHARGE," Surface Review and Letters (SRL), World Scientific Publishing Co. Pte. Ltd., vol. 3(01), pages 75-78.
    • Handle: RePEc:wsi:srlxxx:v:03:y:1996:i:01:n:s0218625x96000176
    DOI: 10.1142/S0218625X96000176
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