Cooperative multi-agent reinforcement learning for multi-area integrated scheduling in wafer fabs

The existing scheduling methods of wafer fabs focus on single area, achieving local optimisation while failing to realise global optimisation due to neglecting the coordination of multi-area. Therefore, it is necessary to consider the complex opposing relationships between multi-area caused by constraints such as batch processing, re-entrance, and multiple residency times within and between areas to conduct integrated scheduling and shorten the production cycle time. For this issue, this paper proposes a cooperative multi-agent reinforcement learning for multi-area integrated scheduling. Aiming at the dynamic batching and scheduling considering the dynamic arrival lots in multi-area, a multi-agent reinforcement learning algorithm is presented to learn the optimal dynamic batching and scheduling policy firstly. Subsequently, a cooperative multi-agent framework is raised to achieve the global optimisation and coordination of multi-area. Furthermore, an adaptive exploration strategy is constructed to enhance the global exploration capability of the complex solution space caused by residency time constraints and re-entrant property. Moreover, a policy share enhanced Double DQN is employed to improve the generalisation and adaptability of the multi-agent. Finally, the experiments demonstrate that the proposed integrated scheduling method has better comprehensive performance compared to the previous area-separated scheduling methods.