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Allocation of geometrical errors for developing precision measurement machine

Author

Listed:
  • Tao Lai

    (National University of Defense Technology
    Hu’nan Key Laboratory of Ultra-Precision Machining Technology)

  • Junfeng Liu

    (National University of Defense Technology
    Hu’nan Key Laboratory of Ultra-Precision Machining Technology)

  • Fulei Chen

    (National University of Defense Technology
    Hu’nan Key Laboratory of Ultra-Precision Machining Technology)

  • Zelong Li

    (National University of Defense Technology
    Hu’nan Key Laboratory of Ultra-Precision Machining Technology)

  • Chaoliang Guan

    (National University of Defense Technology
    Hu’nan Key Laboratory of Ultra-Precision Machining Technology)

  • Huang Li

    (National University of Defense Technology
    Hu’nan Key Laboratory of Ultra-Precision Machining Technology)

  • Chao Xu

    (National University of Defense Technology
    Hu’nan Key Laboratory of Ultra-Precision Machining Technology)

  • Hao Hu

    (National University of Defense Technology
    Hu’nan Key Laboratory of Ultra-Precision Machining Technology)

  • Yifan Dai

    (National University of Defense Technology
    Hu’nan Key Laboratory of Ultra-Precision Machining Technology)

  • Shanyong Chen

    (National University of Defense Technology
    Hu’nan Key Laboratory of Ultra-Precision Machining Technology)

  • Zhongxiang Dai

    (National University of Defense Technology)

Abstract

A high-precision measurement machine tool faces the challenge of correlating the overall motion accuracy with the components form and positional accuracy. This study presents an innovative method for addressing this issue in ultra-precision measuring machines. A geometric error model based on multibody theory, and a weight model are established to predict measurement results and correlate overall motion accuracy with individual component accuracy. To validate the model, a target overall motion accuracy of 100 nm is set and the all the individual components accuracy is calculated by the geometric error weights derived from the proposed model. By fabricating a critical component, the linear guideway, to meet specific individual accuracies and incorporating it in an ultra-precise measurement machine, the study demonstrates achieving the individual accuracies with the magnetorheological polishing. Finally, the overall motion accuracy is validated by a cross test among the designed machine, DUI profilometer, and Zygo interferometer. By measuring a same optical surface, the measurement results show the surface PV differences better than 100 nm. The results demonstrate the validation of the correlation between overall motion accuracy and component accuracy established by the method described in this paper. In conclusion, this study offers an accurate design solution for determining overall motion and individual accuracies, enabling high accuracy in intelligent manufacturing equipment.

Suggested Citation

  • Tao Lai & Junfeng Liu & Fulei Chen & Zelong Li & Chaoliang Guan & Huang Li & Chao Xu & Hao Hu & Yifan Dai & Shanyong Chen & Zhongxiang Dai, 2025. "Allocation of geometrical errors for developing precision measurement machine," Journal of Intelligent Manufacturing, Springer, vol. 36(6), pages 4105-4127, August.
    • Handle: RePEc:spr:joinma:v:36:y:2025:i:6:d:10.1007_s10845-024-02440-0
    DOI: 10.1007/s10845-024-02440-0
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    References listed on IDEAS

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    1. Qiang Cheng & Hongwei Zhao & Yongsheng Zhao & Bingwei Sun & Peihua Gu, 2018. "Machining accuracy reliability analysis of multi-axis machine tool based on Monte Carlo simulation," Journal of Intelligent Manufacturing, Springer, vol. 29(1), pages 191-209, January.
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