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Analytical Modelling of Hexagonal Shaped Capacitive Micromachined Ultrasonic Transducer

Author

Listed:
  • Rashmi Sharma

    (Amity School of Engineering & Technology
    Research Scholar With Amity University)

  • Rekha Agarwal

    (Amity School of Engineering & Technology)

  • Ashwani Kumar Dubey

    (Amity University)

  • Anil Arora

    (Thapar University)

Abstract

Background For ultrasonic signal generation and detection, the Capacitive Micromachined Ultrasonic Transducers (CMUTs), constructed using semiconductor fabrication processes are basically Microelectromechanical Systems based structures. Utilizing the semiconductor technology, the CMUTs can provide improved bandwidth, high transduction efficiency, ease of batch production etc. in contrast to piezoelectric transducers. Objective The CMUTs can be constructed in various possible geometries like square, rectangular, circular, and hexagonal. It has been found that CMUT with circular geometry provides optimum performance but has the disadvantage of area wastage in array construction due to voids in between the devices. Hence, the hexagonal CMUT is modelled and analyzed with circular CMUT. Method The Kirchhoff’s thin plate theory is employed for novel analytical model of hexagonal CMUT. Result The results comparison is found similar with the circular CMUT with 13.42% of more wafer area utilization. Conclusion The proposed analytical model provides a cheaper design tool for the researchers with highly reduced simulation time.

Suggested Citation

  • Rashmi Sharma & Rekha Agarwal & Ashwani Kumar Dubey & Anil Arora, 2021. "Analytical Modelling of Hexagonal Shaped Capacitive Micromachined Ultrasonic Transducer," International Journal of System Assurance Engineering and Management, Springer;The Society for Reliability, Engineering Quality and Operations Management (SREQOM),India, and Division of Operation and Maintenance, Lulea University of Technology, Sweden, vol. 12(2), pages 252-262, April.
    • Handle: RePEc:spr:ijsaem:v:12:y:2021:i:2:d:10.1007_s13198-020-01046-y
    DOI: 10.1007/s13198-020-01046-y
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