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Ultrathin compound semiconductor on insulator layers for high-performance nanoscale transistors

Author

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  • Hyunhyub Ko

    (Electrical Engineering and Computer Sciences, University of California
    Lawrence Berkeley National Laboratory
    Berkeley Sensor and Actuator Center, University of California
    Present address: School of Nanotechnology and Chemical Engineering, Ulsan National Institute of Science and Technology, Ulsan Metropolitan City, South Korea.)

  • Kuniharu Takei

    (Electrical Engineering and Computer Sciences, University of California
    Lawrence Berkeley National Laboratory
    Berkeley Sensor and Actuator Center, University of California)

  • Rehan Kapadia

    (Electrical Engineering and Computer Sciences, University of California
    Lawrence Berkeley National Laboratory
    Berkeley Sensor and Actuator Center, University of California)

  • Steven Chuang

    (Electrical Engineering and Computer Sciences, University of California
    Lawrence Berkeley National Laboratory
    Berkeley Sensor and Actuator Center, University of California)

  • Hui Fang

    (Electrical Engineering and Computer Sciences, University of California
    Lawrence Berkeley National Laboratory
    Berkeley Sensor and Actuator Center, University of California)

  • Paul W. Leu

    (Electrical Engineering and Computer Sciences, University of California
    Lawrence Berkeley National Laboratory
    Berkeley Sensor and Actuator Center, University of California)

  • Kartik Ganapathi

    (Electrical Engineering and Computer Sciences, University of California)

  • Elena Plis

    (and Center for High Technology Materials, University of New Mexico)

  • Ha Sul Kim

    (and Center for High Technology Materials, University of New Mexico)

  • Szu-Ying Chen

    (Materials Science and Engineering, National Tsing Hua University, Hsinchu 30013, Taiwan)

  • Morten Madsen

    (Electrical Engineering and Computer Sciences, University of California
    Lawrence Berkeley National Laboratory
    Berkeley Sensor and Actuator Center, University of California)

  • Alexandra C. Ford

    (Electrical Engineering and Computer Sciences, University of California
    Lawrence Berkeley National Laboratory
    Berkeley Sensor and Actuator Center, University of California)

  • Yu-Lun Chueh

    (Materials Science and Engineering, National Tsing Hua University, Hsinchu 30013, Taiwan)

  • Sanjay Krishna

    (and Center for High Technology Materials, University of New Mexico)

  • Sayeef Salahuddin

    (Electrical Engineering and Computer Sciences, University of California)

  • Ali Javey

    (Electrical Engineering and Computer Sciences, University of California
    Lawrence Berkeley National Laboratory
    Berkeley Sensor and Actuator Center, University of California)

Abstract

High-performance nanoscale transistors by transfer printing Compound semiconductor materials such as gallium arsenide and indium arsenide have outstanding electronic properties, but are costly to process and cannot, on their own, compete with silicon when it comes to low-cost fabrication. But as the relentless miniaturization of silicon electronics is reaching its limits, an alternative route of enhanced device performance is becoming more attractive: the integration of compound semiconductors within silicon. Ali Javey and colleagues now present a promising new concept to integrate ultrathin layers of single-crystal indium arsenide on silicon-based substrates with an epitaxial transfer method, a technique borrowed from large-area optoelectronics. With this technique, involving the use of an elastomeric stamp to lift off indium arsenide nanowires and transfer them to a silicon-based substrate, the authors fabricate thin film transistors with excellent device performance.

Suggested Citation

  • Hyunhyub Ko & Kuniharu Takei & Rehan Kapadia & Steven Chuang & Hui Fang & Paul W. Leu & Kartik Ganapathi & Elena Plis & Ha Sul Kim & Szu-Ying Chen & Morten Madsen & Alexandra C. Ford & Yu-Lun Chueh & , 2010. "Ultrathin compound semiconductor on insulator layers for high-performance nanoscale transistors," Nature, Nature, vol. 468(7321), pages 286-289, November.
  • Handle: RePEc:nat:nature:v:468:y:2010:i:7321:d:10.1038_nature09541
    DOI: 10.1038/nature09541
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