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Directed block copolymer self-assembly implemented via surface-embedded electrets

Author

Listed:
  • Mei-Ling Wu

    (Key Laboratory of Molecular Nanostructure and Nanotechnology, Institute of Chemistry, Chinese Academy of Sciences (CAS)
    Beijing National Laboratory for Molecular Sciences
    University of CAS)

  • Dong Wang

    (Key Laboratory of Molecular Nanostructure and Nanotechnology, Institute of Chemistry, Chinese Academy of Sciences (CAS)
    Beijing National Laboratory for Molecular Sciences)

  • Li-Jun Wan

    (Key Laboratory of Molecular Nanostructure and Nanotechnology, Institute of Chemistry, Chinese Academy of Sciences (CAS)
    Beijing National Laboratory for Molecular Sciences)

Abstract

Block copolymer (BCP) nanolithography is widely recognized as a promising complementary approach to circumvent the feature size limits of conventional photolithography. The directed self-assembly of BCP thin film to form ordered nanostructures with controlled orientation and localized pattern has been the key challenge for practical nanolithography applications. Here we show that BCP nanopatterns can be directed on localized surface electrets defined by electron-beam irradiation to realize diverse features in a simple, effective and non-destructive manner. Charged electrets can generate a built-in electric field in BCP thin film and induce the formation of perpendicularly oriented microdomain of BCP film. The electret-directed orientation control of BCP film can be either integrated with mask-based patterning technique or realized by electron-beam direct-writing method to fabricate microscale arbitrary lateral patterns down to single BCP cylinder nanopattern. The electret-directed BCP self-assembly could provide an alternative means for BCP-based nanolithography, with high resolution.

Suggested Citation

  • Mei-Ling Wu & Dong Wang & Li-Jun Wan, 2016. "Directed block copolymer self-assembly implemented via surface-embedded electrets," Nature Communications, Nature, vol. 7(1), pages 1-7, April.
    • Handle: RePEc:nat:natcom:v:7:y:2016:i:1:d:10.1038_ncomms10752
    DOI: 10.1038/ncomms10752
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