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Enabling complex nanoscale pattern customization using directed self-assembly

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Listed:
  • Gregory S. Doerk

    (IBM Research—Almaden
    Present address: HGST, 3403 Yerba Buena Road, San Jose, California 95135, USA)

  • Joy Y. Cheng

    (IBM Research—Almaden)

  • Gurpreet Singh

    (IBM Research—Almaden
    Present address: Intel Corporation, 2501 NW 229th Ave, Hillsboro, Oregon 97124, USA)

  • Charles T. Rettner

    (IBM Research—Almaden)

  • Jed W. Pitera

    (IBM Research—Almaden)

  • Srinivasan Balakrishnan

    (IBM Research—Almaden
    Present address: Avogy, 677 River Oaks Parkway)

  • Noel Arellano

    (IBM Research—Almaden)

  • Daniel P. Sanders

    (IBM Research—Almaden)

Abstract

Block copolymer directed self-assembly is an attractive method to fabricate highly uniform nanoscale features for various technological applications, but the dense periodicity of block copolymer features limits the complexity of the resulting patterns and their potential utility. Therefore, customizability of nanoscale patterns has been a long-standing goal for using directed self-assembly in device fabrication. Here we show that a hybrid organic/inorganic chemical pattern serves as a guiding pattern for self-assembly as well as a self-aligned mask for pattern customization through cotransfer of aligned block copolymer features and an inorganic prepattern. As informed by a phenomenological model, deliberate process engineering is implemented to maintain global alignment of block copolymer features over arbitrarily shaped, ‘masking’ features incorporated into the chemical patterns. These hybrid chemical patterns with embedded customization information enable deterministic, complex two-dimensional nanoscale pattern customization through directed self-assembly.

Suggested Citation

  • Gregory S. Doerk & Joy Y. Cheng & Gurpreet Singh & Charles T. Rettner & Jed W. Pitera & Srinivasan Balakrishnan & Noel Arellano & Daniel P. Sanders, 2014. "Enabling complex nanoscale pattern customization using directed self-assembly," Nature Communications, Nature, vol. 5(1), pages 1-8, December.
    • Handle: RePEc:nat:natcom:v:5:y:2014:i:1:d:10.1038_ncomms6805
    DOI: 10.1038/ncomms6805
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